2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

A Silicon Ultrasonic Imager Probe for Minimally Invasive Diagnosis

J.K. Chen, P. Lin, X. Cheng, J-H Liu, S-Y Chen and P-C Li
Xerox Corp, US

ultrasonic image, silicon probe, MEMS

This paper reports the development of a miniaturized ultrasonic transducer array for minimally invasive medical imaging. This probe shape ultrasonic transducer array is smaller than a human hair. Due to its miniature size, this array can be placed or implanted close to the target structure/tissue/organ and performs high-resolution imaging or stimulation using ultrasounds. This device is also useful for near-field imaging for identifying minor disorders in anatomical structure of tumor or tissue. The issue of poor image resolution inherent from long-wavelength waves required for deeper penetration depth can therefore be resolved. In addition to miniaturization, theoretical calculation shows that the acoustic crosstalk due to substrate Lamb wave is lowered by 2.3dB due to substrate thickness reduction. This miniature ultrasonic imager operates at a peak-to-peak voltage less than 40V and is able to transduce ultrasound waves of frequencies ranging from several hundred kHz up to 20MHz at different power level. Preliminary imaging result of a metal wire shot by the imager probe is demonstrated.

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