Nanotechnology Conference and Trade Show - Nanotech 2006
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Technical Conferences
Confirmed Speakers
Nano Electronics & Photonics
Nano Fabrication
Sensors & Systems
Micro & Nano Fluidics
MSM - Modeling Microsystems
WCM - Compact Modeling
Nanostructured Materials & Devices
Soft Nanotechnologies & Applications
Polymer Nanotechnology
Carbon Nano Structures & Devices
Nano Particles & Applications
Composites & Interfaces
Energy Technologies & Applications
Environment & Society
ICCN - Nanoscale Modeling
Nanoscale Characterization
National Security Applications
Bio Nano Materials & Tissues
Bio Sensors & Diagnostics
Biomarkers & Nanoparticles
Cancer Diagnostics, Imaging & Treatment
Cellular & Molecular Dynamics
Computational Modeling in Life Sciences
Drug Delivery & Therapeutics
Nano Medicine
Nanotech to Neurology
Clean & Controlled Environments
TechConnect Summit - IP Matchmaking
Industrial Impact Workshop
Program Committee

Conference Proceedings

Conference Technical Proceedings

Ninth International Conference on

Modeling and Simulation of Microsystems

MSM 2006

May 7 - 11, 2006
Hynes Convention Center
Boston, Massachusetts, U.S.A

An Interdisciplinary Integrative Forum on
Modeling, Simulation and Scientific Computing in the MEMS, Microelectronic,
Semiconductor, Sensors, Materials and Biotechnology fields.

MSM - Modeling Microsystems
Speakers Program Announcement Topics Organization Events

Kenotes: Sensors & Systems joint with MSM and MEMS & NEMS

Roger T. Howe Nano Electromechanical Devices: Opportunities and Challenges
Roger T. Howe
Stanford University, US
(speaker biography)
Gary K. Fedder A Designer’s Guide to CMOS MEMS
Gary K. Fedder, Carnegie Mellon University, US
(speaker biography)
Kensall D. Wise Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information
Ken D. Wise, University of Michigan, Ann Arbor, , USA, (speaker biography)
Anantha P. Chandrakasan Micropower Wireless Sensors
Anantha P. Chandrakasan,
Associate Director, Microsystems Technology Laboratories
Massachusetts Institute of Technology, US
(speaker biography)

Confirmed Plenary Speakers

Joe Paradiso Joe Paradiso,
Director of Responsive Environments Lab
Massachusetts Institute of Technology, US
(speaker biography)
Andrei M. Shkel Inertial Sensors — Smart Sensor Design Challenges
Andrei M. Shkel, University of California, Irvine, US
(speaker biography)
Mehran Mehregany Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications
Mehran Mehregany, Case Western Reserve University, US
(speaker biography)


Symposium Sessions


Monday May 8

6:00 Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903

Tuesday May 9

8:30 Keynote - Sensors & Systems: MEMS & NEMS, MSM
8:30 WCM 1 - Bulk MOS intrinsic models
10:30 Sensors & Systems: MEMS Sensors
10:30 MSM: Numerics and Methods
10:30 WCM 2 - Bulk MOS intrinsic models
1:30 Sensors & Systems: Smart Systems
1:30 MSM: MEMS Device Modeling
1:30 WCM 3 - Bulk MOS intrinsic models
1:30 Fluidics: Micro & Nano Flow Modeling & Fundamentals: Sponsored by Kodak
4:00 WCM 4 - Double/multiple-gate MOS models
4:00 Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716
 MEMS Device Modeling
 Numerical and Computational Methods
 Micro & Nano Fluidics - 2
6:00 Fluidics: Integrated Micro Fluidic Systems: Sponsored by Kodak

Wednesday May 10

8:30 Keynote - Sensors & Systems: Microsystems: MSM
8:30 Keynote - Nanotech Materials and Chemistry: NanoFab: Nano Electronics
8:30 WCM 5 - Double/multiple-gate MOS models
10:30 Sensors & Systems: Wireless Sensor Networks
10:30 WCM 6 - Statistical Modeling & TCAD-based Models
1:30 MSM: Novel MEMS Devices & Processes
4:00 Sensors & Systems: Novel MEMS, NEMS & Sensing
4:00 Bio Sensors and Diagnostics: Fluidics: Lab-On-Chip
6:00 Poster Session 3 and Reception
 Bio Micro Systems
 Sensor Systems

Thursday May 11

8:30 Keynotes - NanoFab: Nano Electronics
8:30 WCM - 10: High-voltage/passive-element models
10:30 WCM 11 - Bipolar/HBT and MOSFET models

Symposium Program


Monday May 8

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6:00 Poster Session 1 and Nanotech Exhibit Reception hosted by Advance Nanotech, booth #903Expo Hall

Tuesday May 9

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8:30 Keynote - Sensors & Systems: MEMS & NEMS, MSMRoom 112
 Session chair: Elena Gaura, Coventry University, UK
8:30 Nano Electromechanical Devices: Opportunities and Challenges (invited)
R.T. Howe, Stanford University, US (speaker biography)
9:15 A Designer’s Guide to CMOS MEMS (invited)
G.K. Fedder, S. Simone and N. Sarkar, Carnegie Mellon University, US (speaker biography)
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8:30 WCM 1 - Bulk MOS intrinsic modelsRoom 202
 Session chair: Xing Zhou, Nanyang Technological University, Singapore
8:30 Carrier Generation and Recombination Currents At Interface Traps in Surface-Potential-Based MOS Transistor Compact Models (invited)
C-T Sah and B.B. Jie, University of Florida, US
9:00 Symbolic charge-based MOSFET model (invited)
C. Galup-Montoro and M.C. Schneider, Federal University of Santa Catarina, BR
9:30 Theory and Modeling Techniques used in PSP Model (invited)
G. Gildenblat, X. Li, H. Wang, W. Wu, A. Jha, R. van Langevelde, A.J. Scholten, G.D.J. Smit and D.B.M. Klaassen, Pennsylvania State University, US
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10:30 Sensors & Systems: MEMS SensorsRoom 112
 Session chair: Mehran Mehregany, Case Western Reserve University, USA
10:30 A Novel Optical Waveguide Based Accelerometer
F. Chen, Z. Salcic and J. Wang, The University of Auckland, NZ
10:50 Optical Micro-Spectrometer with Sub-Nanometer Resolution
I. Avrutsky, K. Chaganti, I. Salakhutdinov and G. Auner, Wayne State University, US
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10:30 MSM: Numerics and MethodsRoom 106
 Session chair: Cy Wilson, NASA Langley Research Center, US
10:30 Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators
S. Stoffels, L.J. Fernández, R. Puers and H.A.C. Tilmans, IMEC, BE
10:50 Wall Functions for Incorporation of Atomistic Physics into Continuum Modeling of Electrokinetic Flow
R.H. Nilson and S.K. Griffiths, Sandia National Laboratories, US
11:10 Parametric Simulation of MEMS Based on Automatic Differentiation of Finite Element Codes
V.A. Kolchuzhin, J.E. Mehner, T. Gessner and W. Doetzel, Chemnitz University of Technology, DE
11:30 A Nyström-Like Approach to Integral Equations with Singular Kernels
S.-H. Kuo and J.K. White, Massachusetts Institute of Technology, US
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10:30 WCM 2 - Bulk MOS intrinsic modelsRoom 202
 Session chair: Gennady Gildenblat, Pennsylvania State University, USA
10:30 An Improved MOS Transistor Model with an Integrated Mobility Model (invited)
J.R. Hauser, N.C. State University, US
11:00 Benchmark Tests on Conventional Surface Potential Based Charge-Sheet Models And the Advanced PUNSIM Development (invited)
J. He, Y. Song, X. Niu, G. Zhang, X. Zhang, R. Huang, M. Chan and Y. Wang, Peking university, CN
11:30 Accuracy of Surface-Potential-Based Long-Wide-Channel MOS Transistor Compact Models (invited)
B.B. Jie and C-T Sah, University of Florida, US
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1:30 Sensors & Systems: Smart SystemsRoom 112
 Session chair: Gary K Fedder, Carnegie Mellon University, USA
1:30 Evolution of Chip-Scale Gyroscopes: From Solid-State to Atomic (invited)
A.M. Shkel, University of California Irvine, US (speaker biography)
2:00 Validation for Micro- and Nano-Sensors (invited)
M. Henry, Oxford University, UK (speaker biography)
2:30 “Smart” Holograms – A Novel Diagnostics Platform (invited)
S. Kabilan, A.J. Marshall, A. Horgan, C.D. Creasey, S.J. Kew, K.E.S. Dean, S.F. Terrell, L.J. Affleck, Smart holograms, UK (speaker biography)
3:00 Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications (invited)
M. Mehregany, X-A Fu and L. Chen, Case Western Reserve Univesity, US (speaker biography)
3:30 Nanotechnology Enabled Research at the North Dakota's Center for Nanoscale Science and Engineering: Novel Approaches to Sensing (invited)
D.B. Chrisey, North Dakota State University, US (speaker biography)
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1:30 MSM: MEMS Device ModelingRoom 106
 Session chair: Bob Newman, Coventry University, UK
1:30 Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures
J. Liu, G.K. Fedder, S. Sassolini and N. Sarkar, Carnegie Mellon University, US
1:50 MEMS Process Characterization with an on-Chip Device
D. Garmire, H. Choo, R.S. Muller, S. Govindjee and J. Demmel, UC Berkeley, US
2:10 Analytic Damping Model for a Square Perforation Cell
T. Veijola, Helsinki University of Technology, FI
2:30 Simulations of the Anchor Losses in MEM Disk Resonators
D. Paci, S. Stoffels and H.A.C. Tilmans, IMEC, BE
2:50 Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes
R. Khalilyulin, T. Hauck and G. Wachutka, Munich University of Technology, DE
3:10 Microcantilever Sensor via Second Order Sliding Mode Control
J. English, Y. Shtessel, M. Yegnaraman and M. George, University of Alabama in Huntsville, US
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1:30 WCM 3 - Bulk MOS intrinsic modelsRoom 202
 Session chair: Christian Enz, Swiss Center for Electronics and Microtechnology, Switzerland
1:30 Advanced Compact MOSFET Model HiSIM2 Based on Surface Potentials with a Minimum Number of Approximation (invited)
M. Miura-Mattausch, D. Navarro, N. Sadachika, G. Suzuki, Y. Takeda, M. Miyake, T. Warabino, K. Machida, T. Ezaki, H.J. Mattausch, T. Ohguro, T. Iizuka, M. Taguchi, S. Kumashiro, R. Inagaki and S. Miyamoto, Hiroshima University, JP
2:00 Halo Doping: Physical Effects and Compact Modeling (invited)
S. Mudanai, R. Rios, W-K Shih, P. Packan and S-W Lee, Intel Corp., US
2:30 Compact Iterative Field Effect Transistor Model (invited)
M.S. Shur, V. Turin and D. Veksler, T. Ytterdal, B. Iñiguez and W. Jackson, Rensselaer Polytechnic Institute, US
3:00 Unified Approach to Bulk/SOI/UTB/s-DG MOSFET Compact Modeling (invited)
X. Zhou, K. Chandrasekaran, S.B. Chiah, W. Shangguan, Z. Zhu, G.H. See, S. Mani Pandey, G.H. Lim, S. Rustagi, M. Cheng, S. Chu and L-C Hsia, Nanyang Technological University, SG
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1:30 Fluidics: Micro & Nano Flow Modeling & Fundamentals: Sponsored by KodakRoom 104
 Session chair: James Gleeson, University College Cork, UK
1:30 Simulation of Electrokinetic Flow and Analyte Transport in Nano Channels
J.J. Feng, S. Krishnamoorthy, G.W. Wang and S. Sundaram, CFD Research Corporation, US
1:50 Infinitely fast reactions in micromixers
J.P. Gleeson, University College Cork, Ireland, IE
2:10 Electric Field Driven Motion of Flexible Polyelectrolytes – A Molecular Dynamics Study
T.S. Lo, B. Khusid, A. Acrivos and J. Koplik, New Jersey Institute of Technology, US
2:30 Macromodeling for Microfluidic Channels
C-W Kuo, C-M Chein and Y-J Yang, National Taiwan University, TW
2:50 Capillary filling speed in silicon dioxide nano-channels
S.E. Jarlgaard, M.B.L. Mikkelsen, P. Skafte-Pedersen, H. Bruus and A. Kristensen, Technical University of Denmark, DK
3:10 Magnetohydrodynamic (MHD) Complex Flow Generation in Microchannel
D.S. Kim and T.H. Kwon, Pohang University of Science and Technology (POSTECH), KR
3:30 Analysis of the Droplet Ejection for Piezoelectric-driven Industrial Inkjet Head
S. Sim, S-J Park, C. Park, Y. Yoo, Y. Kim, J. Joung and Y. Oh, Samsung Electro Mechanics Co., KR
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4:00 WCM 4 - Double/multiple-gate MOS modelsRoom 202
 Session chair: Mitiko Miura-Mattausch, Hiroshima University, Japan
4:00 BSIM4 and BSIM Multi-Gate Progress (invited)
M.V. Dunga, C.–H. Lin, X. Xi, S. Chen, D.D. Lu, A.M. Niknejad and C. Hu, UC Berkeley, US
4:30 A Charge-Based Compact Model of Double Gate MOSFET (invited)
A.S. Roy, C.C. Enz and J.M. Sallese, CSEM, CH
5:00 Precise 2D Compact Modeling of Nanoscale DG MOSFETs Based on Conformal Mapping Techniques (invited)
T.A. Fjeldly, S. Kolberg and B. Iñíguez, Norwegian University of Science and Technology, NO
5:30 Recent Upgrades and Applications of UFDG (invited)
J.G. Fossum, V.P. Trivedi, M.M. Chowdhury, S.H. Kim and W. Zhang, University of Florida, US
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4:00 Poster Session 2 and Nanotech Exhibit Reception hosted by Feinstein Kean Healthcare, booth #716Expo Hall
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MEMS Device ModelingExpo Hall
- Parameterizable Library Components for SAW Devices
W.C. Wilson and G.M. Atkinson, NASA Langley Research Center, US
- Strong and Weak Inversion Mode of MOS in the Design of Direction Sensitivity Matrix
M. Husak, A. Boura and J. Jakovenko, Czech Technical University in Prague, CZ
- Two-To-One Internal Resonance in Microscanners
M.F. Daqaq, E.M. Abdel-Rahman and A.H. Nayfeh, Virginia Polytechnic Institute and State University, US
- Manipulation of Capillary force by Electrowetting for Micromanipulation
S. Chandra and C. Batur, University of Akron, US
- Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch
W. Wang, R. Popuri, S. Onishi, J. Bumgarner and L. Langebrake, University of South Florida, US
- Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration
B. Bercu, L. Montès and P. Morfouli, INPG-MINATEC, FR
- Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements
J. You, M. Packirisamy and I. Stiharu, Concordia University, CA
- Application of a Design Methodology Using a 2D Micro Scanner
O. Anac and I. Basdogan, Koc University, TR
- Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors
A. Sabet and X.J. Avula, Washington University in St. Louis, US
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Numerical and Computational MethodsExpo Hall
- Systematic Approach on Modeling and Identification for Nanobattery Prototyping
P. Bhattacharya, Z. Ye, E. Walker, F. Lacy and M. Banerjee, Southern University, US
- Analytical Models for Quantized Sub-Band Energy Levels and Inversion Charge Centroid of MOS Structures Derived from Asymptotic and WKB Approximations
H. Abebe, E. Cumberbatch, H. Morris and V. Tyree, USC/ISI, US
- Stability of micro and nano devices actuated by Casimir forces
J. Hernández and R. Esquivel-Sirvent, Instituto de Fisica, UNAM, MX
- A Generic Scientific Simulation Environment for Multidimensional Simulation in the Area of TCAD
R. Heinzl, M. Spevak, P. Schwaha and T. Grasser, Institute for Microelectronics, AT
- Numerical Capacitance Calculation for Mems Pressure Sensor by Method of Moments
- Adaptive temperature estimation in 3D single-cell dielectrophoretic traps using the boundary Element Method
C. Rosales, Institute of High Performance Computing, A*STAR, SG
- Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams
V. Rochus, D.J. Rixen and J.-C. Golinval, university of Liège, BE
- Optimization of Piezoelectric Transformers Using Elite Genetic Algorithm
C-Y. Kang, C-K Lee and Y-J Yang, National Taiwan University, TW
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Micro & Nano Fluidics - 2Expo Hall
- Microfluidic System for Assessing the Controllability of MC-1 Magnetotactic Bacteria as Carriers in Micro-channels
Z. Lu and S. Martel, NanoRobotics Laboratory, CA
- Microfluidics and Rheology of Carbon Black Dilute Suspensions: Modeling, Measurement, and Applications
C. Aramphongphun, O. Hemminger, J.M. Castro and L.J. Lee, The Ohio State University, US
- Synthesis of Shear Thickening Fluid Using Sonochemical Method
V.K. Rangari, T.A. Hassan, H. Mahfuz and S. Jeelani, Tuskegee University, US
- A Micromachined Sparse Cell Isolation Device: Application in Prenatal Diagnostics
H. Mohamed, J.N. Turner and M. Caggana, Wadsworth Center, New York State Department of Health, US
- Chemically Robust Microfluidic Devices for Radiochemistry Platforms
J.P. Rolland, A. Elizarov, J. Brewster, J.R. Heath and J.M. DeSimone, Liquidia Technologies, US
- Chaotic flows in microchannels: A lattice Boltzmann study
F. Varnik and D. Raabe, Max-Planck Institut fuer Eisenforschung, DE
- Microfluidic T-Form Mixer Utilizing Pressure Disturbances
Y.B. Ma, M. Fields, C.P. Sun, F.Y. Zhang, J.C. Liao, Y. Li, B.M. Churchill and C.M. Ho, University of California at Los Angeles, US
- Thermal modeling of a PMMA microfluidic separation chip
Y. Zhu and A. Bui, CSIRO Australia, AU
- Cell and Particle Concentration on the Chip
D. Irimia and M. Toner, Massachusetts General Hospital, Harvard Medical School, US
- Modeling multi-scale liquid dispersion phenomena in conjunction with Computational Fluid Dynamics
S. Mohan, A. Haidari and A. Mukopadhyay, Fluent, Inc., US
- Optical and impedance detection of DNA hybridisation on barcoded micro particles in a microfluidic device
D. Holmes, A. Whitton, G. Cavalli-Petraglia, G. Galitonov, S. Birtwell, S. Banu, N. Zheludev and H. Morgan, University of Southampton, UK
- Numerical Simulation of Microchannel Convection
L. Wang and F. Liu, The University of Hong Kong, HK
- Characterisation of thin film piezoelectric materials by differential interferometric techniques
M.G. Cain, M. Steward and M. Downs, National Physical Laboratory, UK
- Nano level study of superhydrophobic material with an acoustic multiresonance shear wave sensors
S.J. Kwoun, R.M. Lec, R.A. Cairncross, P. Shah and C.J. Brinker, Drexel University, US
- A Behavior of Protein Adsorption on Poly(Ethylene Glycol)-Modified Surfaces under Flow Conditions at Relatively Low Concentrations for Microfluidics Systems
C.J. Chun, K. Lenghaus, L. Riedel, A. Bhalkikar and J.J. Hickman, University of Central Florida, US
- Integrated Microfluidic Device with an Electroplated Palladium Decoupler for Electrochemical Detection of the 8-hydroxydeoxyguanosine (8-OH-dG) DNA Adduct
A.A. Dawoud, T. Kawaguchi and R. Jankowiak, Iowa State University, US
- Analytical Model for Magnetic Particle Transport in a Magnetically Biased Microfluidic System
E.P. Furlani, University at Buffalo, US
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6:00 Fluidics: Integrated Micro Fluidic Systems: Sponsored by KodakRoom 209
 Session chair: Boris Khusid, New Jersey Institute of Technology, US
6:00 Thermally Induced Marangoni Instability of Liquid Microjets with Application to Continuous Inkjet Printing
E.P. Furlani, B.G. Price, G. Hawkins and A.G. Lopez, Eastman Kodak Co., US
6:20 Integrated microfluidic device to monitor the cells acidification rate in nanoliter volumes using microfabricated iridium oxide electrodes
I.A. Ges, B.L. Ivanov and F.J. Baudenbacher, Vanderbilt University, US
6:40 Coin-Shaped Reactor in Microfluidic Devices Used for Radiopharmaceutical Synthesis
A.M. Elizarov, H.C. Kolb, R.M. van Dam, J.R. Heath, H.C. Padgett, J. Huang, A. Daridon, California Institute of Technology, US
7:00 Mixed-Methodology-Based System-Level Simulation of Biochemical Assays in Integrated Microfluidic Systems
Y. Wang, A.S. Bedekar, S. Krishnamoorthy, S.S. Siddhaye and S. Sundaram, CFD Research Corporation, US

Wednesday May 10

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8:30 Keynote - Sensors & Systems: Microsystems: MSMRoom 112
 Session chair: Elena Gaura, Coventry University, UK
8:30 Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information (invited)
K.D. Wise, University of Michigan, US (speaker biography)
9:15 Micropower Wireless Sensors (invited)
A.P. Chandrakasan, N. Verma, J. Kwong, D. Daly, N. Ickes, D. Finchelstein, B. Calhoun, Massachusetts Institute of Technology, US (speaker biography)
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8:30 Keynote - Nanotech Materials and Chemistry: NanoFab: Nano ElectronicsRoom 210
 Session chair: Leo Ocola, Argonne National Lab, US
8:30 Integrating soft and hard materials in nanoscale based devices (invited)
N. Petersen, NRC-CNRC, CA (speaker biography)
9:15 Nanotechnology and Energy, the Smalley Vision: Be a Scientist-- Save the World (invited)
W. Adams, Amy Jaffe and Richard Smalley(deceased), Smalley Institute, Rice University, US (speaker biography)
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8:30 WCM 5 - Double/multiple-gate MOS modelsRoom 106
 Session chair: Colin McAndrew, Freescale Semiconductor, USA
8:30 DC to RF Small-Signal Compact DG MOSFET model (invited)
B. Iñíguez, A. Lázaro, O. Moldovan, A. Cerdeira and T.A. Fjeldly, Universitat rovira i Virgili (URV), ES
9:00 An Explicit Quasi-Static Charge-Based Compact Model for Symmetric DG MOSFET (invited)
F. Prégaldiny, F. Krummenacher, J.-M. Sallese, B. Diagne and C. Lallement, InESS, FR
9:30 On the Modeling of the Current-Voltage Characteristics of a Symmetrical Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistor with an Undoped Body (invited)
M. Wong and X. Shi, Hong Kong University of Science and Technology, HK
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10:30 Sensors & Systems: Wireless Sensor NetworksRoom 112
 Session chair: Ken D Wise, University of Michigan, USA
10:30 Experimental Localization with MICA2 Motes
M.P. Allen, E.I. Gaura, R.M. Newman and S.N.I. Mount, Coventry University, UK
10:50 Size does matter – the case for big motes (invited)
R.M. Newman and E.I. Gaura, Coventry University, UK (speaker biography)
11:10 Wireless Micro and Nano Sensors for Physiological and Environmental Monitoring
B. Kaminska, Simon Fraser University, CA
11:30 Bridge Local Scour Monitoring System Using MEMS Sensor Zigbee Network
Y-B Lin, C-C Lee, J-C Chen, K-C Chang and J-S Lai, National Center for Research on Earthquake Engineering, TW
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10:30 WCM 6 - Statistical Modeling & TCAD-based ModelsRoom 106
 Session chair: Man Wong, Hong Kong University of Science and Technology, Hong Kong
10:30 Device Correlation: Modeling using Uncorrelated Parameters, Characterization Using Ratios and Differences (invited)
C.C. McAndrew and P.G. Drennan, Freescale Semiconductor, US
11:00 Modeling Small MOSFETs using Ensemble Devices (invited)
J.S. Watts, R. Pino and H. Trombley, IBM, US
11:30 Effects of Scaling on Modeling of Analog RF MOS Devices (invited)
Y. Liu, S. Cao, T.Y. Oh, B. Wu, O. Tornblad and R.W. Dutton, Stanford University, US
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1:30 MSM: Novel MEMS Devices & ProcessesRoom 104
 Session chair: Skandar Basrour, TIMA, Micro and Nano Systems Group, France
1:30 Electromechanical System for Lorentz Force Compensation
P. Sekalski, A. Napieralski and S. Simrock, Technical University of Lodz, PL
1:50 Negative-Poisson’s-Ratio (NPR) Microstructural Material by Soft-Joint Mechanism
Y-W Lu, C-J Chang, P-T Lin and H-C Gea, Rutgers University, US
2:10 Optimization of Diffractive MEMS for Optical Switching
J. Verheggen, G. Panaman, W. Khan Raja and J. Castracane, University at Albany, SUNY, US
2:30 Active Sealing for Soft Poymer Microchips
H. Bang, W.G. Lee, J. Park, H. Yun, J. Lee, S. Chung, K. Cho, C. Chung, D-C Han and J.K. Chang, Seoul National University, KR
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4:00 Sensors & Systems: Novel MEMS, NEMS & SensingRoom 112
 Session chair: Ashwin Seshia, Cambridge University, UK
4:00 Power Generation based on Micro-Electro Mechanical Devices (invited)
S. Basrour, TIMA Laboratory, FR (speaker biography)
4:30 A Bio-Inspired Rotor Powered by a Micro-Bubble
J. Kao, J. Warren, J. Xu and D. Attinger, Columbia University, US
4:50 MEMS-based solid propellant micro-rocket with micro-igniter on thin membrane for next generation of low-cost small space and aeronautic engines
A. Chaalane, C. Rossi and D. Estève, LAAS-CNRS, FR
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4:00 Bio Sensors and Diagnostics: Fluidics: Lab-On-ChipRoom 208
 Session chair: Martin Gijs, EPFL, CH
4:00 Microfluidics and Miniaturized Arrayed Assays for the Evaluation of Biological Diversity (invited)
G. Dernick, Hoffmann-La Roche AG, CH (speaker biography)
4:30 Compact Disc (CD)-Based Automated Animal Assay
N.H. Kim, C.M. Dempsey, J. Zoval, J.Y. Sze and M.J. Madou, University of California, Irvine, US
4:50 DNA repair enzyme analysis on EWOD fluidic microprocessor
D. Jary, A. Chollat-Namy, Y. Fouillet, J. Boutet, C. Chabrol, G. Castellan, D. Gasparutto and C. Peponnet, CEA, FR
5:10 Detection and Localization of Antibody-Antigen Interactions with High Spatial Resolution on Collagen Tendons
R.D. Boyd, R. Avci, M. Schweitzer, J. Wittmeyer, B. Spangler and K.M. Thieltges, Cranfield University, UK
5:30 Fast and Efficient Nucleic Acid Testing by ST‘s In-CheckTM Lab-on-Chip Platform
S. Conoci, P. Di Pietro, S. Petralia, M.G. Amore, F. San Biagio, G. Alaimo, G. Iacono, E. Alessi, D. Ricceri, G. Di Trapani, F. Di Francesco and M. Palmieri, STMicroelectronics, IT
5:50 Optimizing antibody microarrays for high resolution SPR microscopy
G. Kim, A. Nishimoto, S. Cong, E. Johnson, H.W. Guan, B. Petcavish, S. Lasky, L. Hood and C.T. Campbell, Lumera Corporation, US
6:10 A Continuous Particle/Cell Sorter Using Dielectrophoresis
G.R. Wang, J.J. Feng, S. Vasantgadkar, K. Pant, B. Prabhakarpandian, S. Krishnamoorthy and S. Sundaram, CFD Research Corporation, US
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6:00 Poster Session 3 and ReceptionHall D
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- Building an Effective Patent Portfolio
- Fabrication and Characterization of Ultra Thin Resonant Nanocantilevers in Aluminium-Molybdenum Composites
N. Nelson-Fitzpatrick, L.M. Fischer, S. Evoy, C. Ophus, Y. Wang, D. Mitlin, Z-H. Lee, V. Radmilovic and U. Dahmen, University of Alberta, CA
- Tuning of a MEMS RF Filter
B.K. Hammad, E.M. Abdel-Rahman and A.H. Nayfeh, Virginia Polytechnic Institute and State University, US
- Low Cost Vibration Measuring Device Using MEMS Accelerometer
J. Pandiyan, M. Umapathy, S. Balachandar, M. Arumugam and S. Ramaswamy, Larsen & Toubro Limited, IN
- The Bonding Technology for Microchannels with Electrode Patterns on the Glass Substrates
S.H. Parng, H.J. Yang and T.K. Shia, Microsystem Technology Common Laboratory, TW
- Biocompatible Hybrid System Integration of Silicon Based Neural Interface Device
P. Tathireddy, S. Chakravarthy, J. Hsu, M. Klein, H. Oppermann, L. Rieth, R. Harrison, R.A. Normann, F. Solzbacher, University of Utah and Fraunhofer Institute, Germany, US
- MEMS Reliability Assessment Program – Progress to Date
J.L. Zunino III and D.R. Skelton, U.S. Army ARDEC, US
- Three-dimensional Simulation method of Anisotropic Wet Chemical Etching Process
J-G Lee and T. Won, Inha University, KR
- Frequency Tuning of Micro-beams using Electrostatic Pull-in
J.S. Burdess, A.J. Harris and S. Kafumbe, University of Newcastle, UK
- Investigating the Benefit-Cost of MEMS Application for Structural Health Monitoring of Transportation Infrastructure
M.K. Jha and A.B. Davy, Morgan State University, US
- Nonlinear Oscillators as Nanomechanical Memory
R. Badzey, A. Gaidarzhy, G. Zolfagharkhani and P. Mohanty, Boston University, US
- RF Oscillators Obtained From Coupled Nanomechanical Devices
A. Gaidarzhy, G. Zolfagharkhani, R. Badzey and P. Mohanty, Boston University, US
- Dielectrophoretic ratchets for linear and rotary nanomotors
M.P. Hughes and R.D. Astumian, University of Surrey, UK
- A Capillary Electrophoresis Chip for Rhodamine B and Inorganic Ion detection Utilizing Contactless Capacitance Detection
W.L. Liu, W.J. Chen, S.H. Hsieh and T.K. Tsai, National Pingtung University of Science and Technology, TW
- Ultra High performance In-line Contact MEMS RF Switch
Y-T Hong, C-H Kim, S-H Lee, S-W Kwon and I-S Song, Samsung Advanced Institute of Technology, KR
Back to Top
Bio Micro SystemsHall D
- Design of a Wireless Passive Microsensor for Injection into the Human Brain
J.P.F. Spratley, P.S. Hall and M.C.L. Ward, University of Birmingham, UK
- Preservation of DNA and Protein Biofunctionality for Bio-MEMS & NEMS Fabrication
D. Trau, J. Jie and N.J. Sucher, National University of Singapore (NUS), SG
- Reflex-arc on a chip: An in silico cell culture analogue
K.A. Wilson, M. Das, P. Molnar and J.J. Hickman, University of Central Florida, US
Back to Top
Sensor SystemsHall D
- Odor sensor using quartz crystal microbalance coated with molecular recognition membrane
H. Nanto, Y. Takei, T. Imamura and D. Ishigure, Kanazawa Institute of Technology, JP
- Fabrication technique for nanochannel with directed buckle patterning
S. Chung, M-W Moon, K.H. Oh, D.C. Han, R.D. Kamm and J.W. Hutchinson, Massachusetts Institute of Technology, US
- An Analytical Model for Multi-layer and Multi-electrode Piezoelectric Ceramic Actuators
B-L. Wang and Y-W. Mai, The University of Sydney, AU
- A Novel FSMA Actuation Mechanism for MIcrovalve Applications
A. Agarwal, M. Kohl and W. Basuki, Indian Institute of Technology, IN
- MEMS Micro Spectrometer
E.R. Schildkraut, D.J. Cavicchio and D. Reyes, Block MEMS, LLC, US
- Electrospun TiO2 nanofibers for gas sensing applications
I-D Kim, A. Rothschild, H.L. Tuller, D.Y. Kim and S.M. Jo, Korea Institute of Science and Technology, KR
- A Nanoporous Silicon 1-D Photonic Band Gap Microcavity as a Selective Optical Sensor
S. Chappel, L. DeLouise and B. Gersten, Queens College, US
- Sensitivity of Initially Stressed Un-symmetric Micro-Layered Plate in Large Deflection due to Lateral Load
C-F. Chen, Chung-Hua University, TW
- The Dynamic Performance of a Micro-machined Coriolis Flow Meter
C. Clark, S. Wang and R. Cheesewright, Brunel University, UK
- Trade-Offs in Cooperative Goal Seek using Nano-Devices
S. Chnadrasekaran and D.F. Hougen, Oklahoma University, US

Thursday May 11

Back to Top
8:30 Keynotes - NanoFab: Nano ElectronicsRoom 112
 Session chair: Leo Ocola, Argonne National Laboratory, US
8:30 Nanomanufacturing Challenges (invited)
D. Eaglesham, Applied Materials, US (speaker biography)
9:15 Nanotechnology from the bottom up: Light-directed Synthesis of DNA molecules (invited)
F. Cerrina, University of Wisconsin-Madison, US (speaker biography)
Back to Top
8:30 WCM - 10: High-voltage/passive-element modelsRoom 105
 Session chair: Michael Schroter, University of Technology Dresden, Germany
8:30 High-Voltage LDMOS Compact Modeling (invited)
M.B. Willemsen, R. van Langevelde and D.B.M. Klaassen, Philips Research, NL
9:00 Analog Compact Modeling for a 20-120V HV CMOS Technology (invited)
E. Seebacher, W. Posch, K. Molnar and Z. Huszka, austriamicrosystems AG, AT
9:30 Compact Modeling of Spiral Inductors for RF Applications (invited)
J. Chen and J.J. Liou, University of Central Florida, US
Back to Top
10:30 WCM 11 - Bipolar/HBT and MOSFET modelsRoom 105
 Session chair: Dirk Klaassen, Philips Research Laboratories, the Netherlands
10:30 Development and Design Kit Integration of a Scalable and Statistical High Current Model for Advanced SiGe HBTs (invited)
R.M. Malladi, K.M. Newton and M.S. Schroter, IBM Systems and Technology, US
11:00 Charge-storage calculation for Si-based bipolar transistors from device simulation (invited)
M. Schröter and H. Tran, UCSD, US
11:30 Compact Modeling of Short Channel Double-Gate MOSFETs (invited)
H. Lu, X. Liang, W. Wang and Y. Taur, Univ. California, San Diego, US
12:00 Recent Advances in the EKV3.0 MOSFET Model (invited)
M. Bucher, A. Bazigos, E. Kitonaki, F. Krummenacher, Technical University of Crete, GR


Announcement and Call for Participation

The largest gathering in the field worldwide, MSM is the premier technical forum for presenting the latest research and development in design, modeling and simulation methods, tools and applications in the MEMS, microelectronic, semiconductor, sensor, materials and biotechnology fields.

The Nanotech 2006 Meeting, MSM & ICCN Conferences, and the WCM workshop will be held at the Hynes Convention Center, Boston, Massachusetts, U.S.A. Centrally located in Boston's popular Back Bay, this location is just steps from some of the city's most popular attractions. The convention center is connected to the conference headquarters Boston Sheraton Hotel, the Prudential Center and the upscale Copley Place Mall, offering more than 200 shops and restaurants, and is also just one block from famed Newbury Street, known for its designer boutiques.

The conference will start Sunday late afternoon with registration and reception, and adjourn Thursday afternoon. Technical sessions run Monday through Thursday. Exhibits are open Monday through Tuesday.

The conference Technical Proceedings, consisting of articles submitted by authors of both oral and poster presentations will, be distributed to participants at registration.

In addition to the Technical Program, an exciting series of Social Events are being prepared to allow attendees ample opportunity to interact socially and enjoy the sights and sounds of the Boston.


The goal of MSM is to bring together researchers, designers, programmers and vendors involved in microsystem developments (MEMS microelectronic, semiconductor, sensor, materials and biotechnology fields). In an effort to dramatically shorten development time and reduce prototyping costs, simulation activities have experienced phenomenal growth, generating a large number of point solutions, as well as integrated tools.

MSM provides a forum for microsystem simulation specialists, allowing them to be exposed to the state of the art modeling techniques currently implemented in academic or industrial research, encouraging a free exchange of ideas and generating synergies between adjacent specialties. Finally, MSM strives to help advanced modeling techniques diffuse into industry and research centers by organizing workshops, demonstrations and short courses.

Topics and Application Areas



  • Mathematical Modeling and Scaling Laws
  • Numerical Methods
  • Finite and Boundary Element Methods
  • Process, Device and Circuit Simulation
  • Model Calibration, Validation and Metrology
  • Equipment Modeling
  • Co-simulation and Optimization
  • System and Multi-level Modeling
  • Characterization and Reliability
  • Data Bases, Data Exchange and Translators

Application Areas:

  • Semiconductors and Microelectronics
  • Quantum Effects, Quantum Devices and Spintronics
  • Advanced Packaging and Interconnects
  • Micro Electro Mechanical Systems (MEMS)
  • Smart Sensors and Structures
  • Advanced Lithography and Photonics
  • Biotechnology
  • Genomics & Proteomics
  • Microfluidics & Lab on Chip
  • High Throughput Screening
  • Point of Care Diagnostics
  • Electromagnetics, RF, Compact Modeling and Signal Integrity
  • Artificial Intelligence and Expert Systems

Conference Organization


Technical Program Chairs

Matthew Laudon, NSTI, USA
Bart Romanowicz, NSTI, USA

Microsystems Chair

Narayan R. Aluru, University of Illinois Urbana-Champaign, USA

Semiconductor Chair

Andreas Wild, Freescale Semiconductor, USA

Program Committee

Xavier J. R. Avula, Washington University, USA
Stephen F. Bart, Bose Corporation, USA
Bum-Kyoo Choi, Sogang University, Korea
Bernard Courtois, TIMA-CMP, France
Peter Cousseau, Honeywell, USA
Robert W. Dutton, Stanford University, USA
Gary K. Fedder, Carnegie Mellon University, USA
David K. Ferry, Arizona State University, USA
Toshio Fukuda, Nagoya University, Japan
Elena Gaura, Coventry University, UK
Steffen Hardt, Institute of Microtechnology Mainz, Germany
Andreas Hieke, Ciphergen Biosystems, Inc., USA
Eberhard P. Hofer, University of Ulm, Germany
Charles H. Hsu, MaxiMEM Limited, USA
Michael Judy, Analog Devices, USA
Yozo Kanda, Toyo University, Japan
Jan G. Korvink, University of Freiburg, Germany
Anantha Krishnan, Defense Advanced Research Projects Agency, USA
Mark E. Law, University of Florida, USA
Mary-Ann Maher, SoftMEMS, USA
Kazunori Matsuda, Naruto University of Education, Japan
Chris Menzel, Nano Science and Technology Institute, USA
Tamal Mukherjee, Carnegie Mellon University, USA
Andrzej Napieralski, Technical University of Lodz, Poland
Ruth Pachter, Air Force Research Laboratory, USA
Michael G. Pecht, University of Maryland, USA
Marcel D. Profirescu, Technical University of Bucharest, Romania
PVM Rao, IIT Delhi, India
Philippe Renaud, Swiss Federal Institute of Technology of Lausanne, Switzerland
Marta Rencz, Technical University of Budapest, Hungary
Siegried Selberherr, Technical University of Vienna, Austria
Sudhama Shastri, ON Semiconductor, USA
Armin Sulzmann, Daimler-Chrysler, Germany
Mathew Varghese, The Charles Stark Draper Laboratory, Inc., USA
Dragica Vasilesca, Arizona State University, USA
Gerhard Wachutka, Technical University of Münich, Germany
Jacob White, Massachusetts Institute of Technology, USA
Thomas Wiegele, BF Goodrich Aerospace, USA
Wenjing Ye, Georgia Institute of Technology, USA
Sung-Kie Youn, Korea Advanced Institute of Science and Technology, Korea
Xing Zhou, Nanyang Technological University, Singapore

Conference Operations Manager

Sarah Wenning, Nano Science and Technology Institute, USA

In Association with

WCM 2006 2006 Workshop on Compact Modeling
WCM 2006
BioNano 2006 2006 NSTI Bio Nano Conference and Trade Show
BioNano 2006
ICCN 2006 2006 International Conference on Computational Nanoscience and Nanotechnology
ICCN 2006
ICCN 2006 2006 NSTI Nanotechnology Conference and Trade Show
Nanotech 2006
Speakers Program Announcement Topics Organization Events
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