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A History of MOS Transistor Compact Modeling

Chih-Tang Sah

Graduate Research Professor and Pittman Eminent Scholar Chair, Department of Electrical & Computer Engineering, University of Florida, US

Chih-Tang Sah is a Graduate Research Professor and the Pittman Eminent Scholar Chair in Electrical and Computer Engineering and the Chief Scientist of College of Engineering at the University of Florida in Gainesville since 1988. From 1962 to 1988, he was a Professor of Physics and Professor of Electrical and Computer Engineering at the University of Illinois in Urbana-Champaign. During 1959 to 1964, he was the head of physics at Fairchild Semiconductor Research and Development Laboratories where he built up and directed a 65-person team to develop the first generation silicon integrated circuit manufacturing technology which included interconnect and contact conductors, diffusion, oxidation, epitaxial growth for production and growth defects, ion-drift-instability in oxide, MOS transistor models (later used by SPICE 1 and 2, and the ‘exact’ long-channel theory whose compact model is being developed today and presented by their developers at this conference), CMOS circuits, and solutions of other silicon bipolar and MOS integrated circuit manufacturing technology problems.

Dr. Sah worked for Shockley during 1956 to 1959 and wrote the 1957-article on electron-hole recombination in forward-biased silicon p/n junction with Robert Noyce and Shockley, and the 1959-article on oxide masking against phosphorus diffusion which gave the oxide-growth and phosphorus-glass reaction kinetics that served as the process-design database for silicon planar oxide-masked monolithic integrated circuits invented by Hoerni and Noyce at Fairchild.

Professor Sah has supervised 50 PhD theses in Physics and Electrical Engineering, given 150 invited talks in China, Taiwan, Singapore, Japan, Canada, USA, and Europe, and written 250 journal articles, all on semiconductor materials and device physics and technology.

Dr. Sah was elected an Academician of the US National Academy of Engineering, the Academia Sinica in Taipei, and the Chinese Academy of Sciences in Beijing. He was appointed an Honorary Professor by the Peking and Tsinghua Universities in Beijing and given an honorary doctorate by the Universiteit de Leuven, Belgium, and the National Chao-Tung University in Hsinchu,Taiwan. He was recognized with the University Research Award by the Semiconductor Industry Association in 1998, the first achievement award in high technology by the Asian-American Manufacturing Association, San Jose, California, in 1984, and the Outstanding Lifetime Achievement Award by the Chinese Institute of Engineers/USA in 2003. He is a Life Fellow of the American Physical Society and IEEE, and was listed as one of the world’s 1000 most-cited scientists during 1966-1978 in a survey made by the Institute of Scientific Information, Philadelphia.

Dr. Sah is presenting in the Workshop on Compact Modeling, WCM 2005.

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