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MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle

H-H Liao and Y-J Yang
National Taiwan University, TW

MEMS, NEMS, nanoscale imaging, dynamic measurement

Recently, the rapid growth of micro- and nano-electromechanical systems (MEMS/NEMS) boosts the demands of advanced diagnostic tools and characterization techniques. One of the most critical demands is the high-resolution tools for measuring MEMS/NEMS dynamic behaviors, such as displacement and velocity. In [1-2], in-plane motions of MEMS devices can be measured up to nano-meters resolution using the stroboscopic principle as well as gradient-based algorithm. Also, with a focus controller, the out-of-plane motion can be measured. In [3], the focus controller was replaced with a splitter and vibrating mirrors that can be integrated inside a microscope, and the out-of-plane resolution was significantly increased. In [4-5], the combination of the optical interferometry and the stroboscopy enables 3D measurement of MEMS devices. In this work, we develop a MEMS/NEMS dynamics measurement tool which employs the stroboscopic principle.

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