Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2005 NSTI Nanotechnology Conference & Trade Show
Nanotech 2005
Bio Nano 2005
Business & Investment
Nano Impact Workshop
Index of Authors
Index of Keywords
Keynote Presentations
Confirmed Speakers
Participating Companies
Industry Focus Sessions
Nanotech Expo
Special Symposia
Venue 2005
Press Room
Site Map
Nanotech 2005 At A Glance
Nanotech Proceedings
Nanotechnology Proceedings
Global Partner
nano tech
Supporting Organizations
Nanotech 2005 Supporting Organization
Media Sponsors
Nanotech 2005 Medias Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461

Fabrication of Silicon Nanowires Using Atomic Layer Deposition

D. Gopireddy, C.G. Takoudis, D. Gamota, J. Zhang and P.W. Brazis
University of Illinois at Chicago, US

nanowires, ALD, nanoparticles, LPCVD, precursors

We will present the synthesis of silicon nanowires using Atomic Layer Deposition (ALD) technique. ALD allows the growth of nanowires in a controlled fashion using the nanoparticles as the seed. The diameter and the length of the nanowire can be precisely controlled using this method. Nanometer size silicon quantum dots / nanoparticles are deposited on silicon dioxide substrate by thermal decomposition of silane (SiH4) using Low Pressure Chemical Vapor Deposition (LPCVD). By controlling the early stages of silicon film growth, silicon nanoparticles of nanometer size can be obtained. These nanoparticles are used at the “seed” to grow silicon nanowires using ALD. Diclorosilane and silane are the precursors used in alternating cycles to form silicon nanowires. It is essential to adjust the experimental conditions to obtain saturated surface reactions of the precursors and self controlled growth process- optimize the deposition temperature, pressure, flow rate of the precursors and the pulse cycle times. The length of the nanowires formed is a function of the number of precursor cycles.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2005 Conference Program Abstract

Gold Sponsors
Nanotech Gold Sponsors
Silver Sponsors
Nanotech Silver Sponsors
Gold Key Sponsors
Nanotech Gold Key Sponsors
Nanotech Ventures Sponsors
Nanotech Ventures Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact