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Add-Drop Filters utilizing Vertically Coupled Microcavities in Silicon

P. Koonath, T. Indukuri and B. Jalali
University of California, Los Angeles, US

microcavity, filter, waveguides, resonator

Micro-resonant optical cavities facilitate dense integration of optical devices on a chip. Through vertical integration of devices, precise control over the critical dimension of the structure can be achieved. Add-drop multiplexers based on vertically coupled microresonators resonators in Silicon, using SIMOX 3-D Sculpting is reported. SIMOX 3-D sculpting involves the implantation of Oxygen ions into a Silicon substrate patterned with thermally grown oxide, followed by a high temperature anneal in order to cure the implantation damage. The thickness of the oxide mask is chosen suitably to decelerate the Oxygen ions that penetrate into the area underneath the mask, resulting the in the formation of buried rib waveguides. After the annealing, microdisks were defined on the top layer Silicon by standard photolithography. Disks of radii 20, 20.5 and 21 microns were used to obtain resonators with slightly shifted resonance wavelengths. The thickness of these disks is around 260 nm. The drop port responses of the filter were characterized using an Amplified Spontaneous Emission (ASE) source show that the devices have a free spectral range of around 5 nm. The best value of the suppression of adjacent channel cross talk of more than 15 dB is observed around 1545 nm.

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