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Design of Experiment Tools for Process and Device Development

N. Olij, A.F. Bakker and A.C.G. Nutt
PhoeniX BV, NL

design of experiment, DOE, parametric design, mask layout, process flow

The functionality of Micro and Nano Technologies (MNT) device is mainly defined by its shape; for instance a membrane sensitivity to pressure depends on its size and thickness. An MNT device therefore needs a multi disciplined approach for design and fabrication. A common design strategy for optimizing device performance is the Design of Experiment (DOE). Multiple packages are available to define such an experiment and analyse the results. A problem arises when the defined experiments are to be translated into the proper and workable designs for MNT devices. PhoeniX has created manufacturing software based tools that act as the missing link in a proper MNT based DOE. This platform allows an MNT designer to define a DOE and retrieve results of the DOE with minimal manual interaction. As a result the designer can concentrate on interpretation of the DOE, which saves time and cost. A faster and more (cost) effective design cycle is now established.

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