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A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Micro-Balancing Technique with Self-Excitation

Y. Lee, G. Lim and W. Moon
Pohang University of Science and Technology, KR

PZT-micro cantilever, self-exciting, mass-micro balancing, biosensor, lab-on-a-chip

A new bio-sensor was developed in order to use in a LOC(Lab-On-a-Chip). The sensor detects the change in the resonance frequency of a micro cantilever with a piezoelectric film(PZT). This is the so-called mass micro-balancing technique which has been successfully used for detecting bio materials in QCM(Quartz Crystal Microbalance). The PZT film is designed to act as both a sensor and an actuator. The method to determine the geometry of micro cantilever is developed to maximize the sensitivity and reliability of sensor. The environmental effects such as viscous damping and added-mass effects in liquid are also considered in design. Furthermore, a new detection method is proposed to measure the resonance frequency shift more easily and reliably in an LOC. These methods and techniques are applied to design and fabricate a piezoelectric micro cantilever biosensor. The fabricated sensor is composed of a 100_m long, 30_m wide, and 5_m thick cantilever with a 2.5_m thick PZT on it. Using the biosensor, a small amount of mussel gluing protein(mgfp), insulin-anti insulin binding protein and poly T-sequence DNA was detected.

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