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The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator

C. Tsou, S.L. Huang, T.S. Lai and H.C. Li
Feng Chia University, TW

MEMS, micro actuator, MEMCAD, out-of-plane, display

This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The proposed actuation mechanism is using the attraction force between the charged bodies to bend the nonconductive suspension U-shape beam of which it can be fabricated using conventional microfabrication processes. The performance of the actuator is evaluated and simulated by MEMCAD software. Initial analysis results indicated that the usage of both the novel U-shape suspension beam and the electrostatic actuation mechanism permit large rotations motion with respect to the increment of the numbers of electrode. Moreover, stable rotational motion can be achieved by varying the dimensions of electrode and gap spacing. For applications, this novel design of micro actuator may be used to provide larger operating range or to act as a micro optical switch, optical display. Moreover, it can be fabricated using microfabrication processes. In summary, it can be seen from this work that a proper design of the dimensions of the U-shape beam and electrode is essential to the success of performing our proposed micro electrostatic actuator. Furthermore, this optimal structure can be obtained by varying geometric dimensions to enhance its performance.

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