Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors
M. Kraft and Y. Dong
Southampton University, UK
MEMS interface, sigma-delta modulator, closed loop, capcitive, sensor
Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper presents simulation and measurement results of different architectures applied to a bulk-micromachined accelerometer.
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Nanotech 2005 Conference Program Abstract