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Eighth International Conference on

Modeling and Simulation of Microsystems

MSM 2005

May 8 - 12, 2005
Anaheim Marriott & Convention Center
Anaheim, California, U.S.A


An Interdisciplinary Integrative Forum on
Modeling, Simulation and Scientific Computing in the MEMS, Microelectronic,
Semiconductor, Sensors, Materials and Biotechnology fields.

Speakers Announcement Topics Organization Events

Confirmed Speakers

Nanotechnology at Motorola Labs
Vida Ilderem, Motorola, US (speaker biography)
Robert Chau Emerging Nanoelectronic Devices and their Benchmarking Methodology
Robert Chau, Intel Corporation, US (speaker biography)
Systems of Microsystems: wireless sensor networks
Deborah Estrin, University of California at Los Angeles, US
From Micro- to Nanosystems: mechanical sensors go nano
Christopher Hierold, ETH Zürich, CH
Lars Samuelson Semiconductor Nanowires for Future Nanoelectronics
Lars Samuelson, Lund University, SE
WINS: protocols design and implementation
Stefan Olariu, Old Dominion University, VA, US
Higher-order Sigma-Delta Modulator Interfaces for MEMS
Michael Kraft, Southampton University, UK
Integrated Resonant Microstructures for Sensor and Timing Applications
Ashwin A. Seshia, Cambridge University, UK
Simulation of Nanostructured Fluids, Soft Materials, & Self-Assembly
Toshihiro Kawakatsu, Tohoku University, JP
Y-nano X-micro technologies: nanometric optical control
Davies William De Lima Monteiro, Federal University of Minas Gerais, BR
Amitesh Maiti Recent Applications of Mesoscale Modeling to Nanotechnology and Drug Delivery
Amitesh Maiti, Accelrys, San Diego, US (speaker biography)
Keith R. Larson Emerging Technologies and Corporate Investment
Keith R. Larson, Intel Capital, US
(speaker biography)
Steve Jurvetson Nanotechnology and Transcending Moore's Law
Steve Jurvetson, Draper Fisher Jurvetson, US
(speaker biography)
Electronics and Optoelectronics with Single Carbon Nanotubes
Phaedon Avouris, IBM, US
James R. Heath Applications of Ultra-Dense Nanowire Circuitry
James R. Heath, California Institute of Technology, US
Timothy D. Sands
Basil S. Turner Professor of Engineering, Purdue University, US (speaker biography)
Smart Dust: Concept->Macro->Micro->Nano
Kris Pister, Berkeley Sensor & Actuator Center, Dust Networks, US
A History of MOS Transistor Compact Modeling
C-T Sah, University of Florida, US
"Intelligent sensors: systems or components?"
Neil White, Southampton University, UK
Consumer and Automotive Embodiments of Smart Sensors
Benedetto Vigna, ST Microelectronics, IT
Data centric wireless sensor networks
Paul Havinga, University of Twente, NL
Node design for pervasive sensor networks: a top down view
Robert M. Newman , Coventry University, UK
In Situ Atmospheric Profiling using Mobile Ad-hoc Sensor Networks
John Manobianco, ENSCO, Inc., US

Industry Symposia

Announcement and Call for Participation

The largest gathering in the field worldwide, MSM is the premier technical forum for presenting the latest research and development in design, modeling and simulation methods, tools and applications in the MEMS, microelectronic, semiconductor, sensor, materials and biotechnology fields.

The Nanotech 2005 Meeting, MSM & ICCN Conferences, and the WCM workshop will be held at the Anaheim Marriott and Convention Center, Anaheim, California, U.S.A. Located in the heart of the exciting Anaheim Resort - sizzling with new attractions and entertainment such as the Disneyland© Resort featuring two magical theme parks, the property offers an outdoor promenade exploding with new restaurants, theatres, and shopping in a tropical setting of majestic palm trees, lush foliage, and vibrant flowers.

The conference will start Sunday late afternoon with registration and reception, and adjourn Thursday afternoon. Technical sessions run Monday through Thursday. Exhibits are open Monday through Tuesday.

The conference Technical Proceedings, consisting of articles submitted by authors of both oral and poster presentations will, be distributed to participants at registration.

In addition to the Technical Program, an exciting series of Social Events are being prepared to allow attendees ample opportunity to interact socially and enjoy the sights and sounds of the Anaheim Resort.


The goal of MSM is to bring together researchers, designers, programmers and vendors involved in microsystem developments (MEMS microelectronic, semiconductor, sensor, materials and biotechnology fields). In an effort to dramatically shorten development time and reduce prototyping costs, simulation activities have experienced phenomenal growth, generating a large number of point solutions, as well as integrated tools.

MSM provides a forum for microsystem simulation specialists, allowing them to be exposed to the state of the art modeling techniques currently implemented in academic or industrial research, encouraging a free exchange of ideas and generating synergies between adjacent specialties. Finally, MSM strives to help advanced modeling techniques diffuse into industry and research centers by organizing workshops, demonstrations and short courses.

Topics and Application Areas



  • Mathematical Modeling and Scaling Laws
  • Numerical Methods
  • Finite and Boundary Element Methods
  • Process, Device and Circuit Simulation
  • Model Calibration, Validation and Metrology
  • Equipment Modeling
  • Co-simulation and Optimization
  • System and Multi-level Modeling
  • Characterization and Reliability
  • Data Bases, Data Exchange and Translators

Application Areas:

  • Semiconductors and Microelectronics
  • Quantum Effects, Quantum Devices and Spintronics
  • Advanced Packaging and Interconnects
  • Micro Electro Mechanical Systems (MEMS)
  • Smart Sensors and Structures
  • Advanced Lithography and Photonics
  • Biotechnology
  • Genomics & Proteomics
  • Microfluidics & Lab on Chip
  • High Throughput Screening
  • Point of Care Diagnostics
  • Electromagnetics, RF, Compact Modeling and Signal Integrity
  • Artificial Intelligence and Expert Systems

Conference Organization


Technical Program Chairs

Matthew Laudon, NSTI, USA
Bart Romanowicz, NSTI, USA

Microsystems Chair

Narayan R. Aluru, University of Illinois Urbana-Champaign, USA

Semiconductor Chair

Andreas Wild, Freescale Semiconductor, USA

Program Committee

Xavier J. R. Avula, Washington University, USA
Stephen F. Bart, Bose Corporation, USA
Bum-Kyoo Choi, Sogang University, Korea
Bernard Courtois, TIMA-CMP, France
Peter Cousseau, Honeywell, USA
Robert W. Dutton, Stanford University, USA
Gary K. Fedder, Carnegie Mellon University, USA
David K. Ferry, Arizona State University, USA
Toshio Fukuda, Nagoya University, Japan
Elena Gaura, Coventry University, UK
Steffen Hardt, Institute of Microtechnology Mainz, Germany
Andreas Hieke, Ciphergen Biosystems, Inc., USA
Eberhard P. Hofer, University of Ulm, Germany
Charles H. Hsu, MaxiMEM Limited, USA
Michael Judy, Analog Devices, USA
Yozo Kanda, Toyo University, Japan
Jan G. Korvink, University of Freiburg, Germany
Anantha Krishnan, Defense Advanced Research Projects Agency, USA
Mark E. Law, University of Florida, USA
Mary-Ann Maher, SoftMEMS, USA
Kazunori Matsuda, Naruto University of Education, Japan
Chris Menzel, Nano Science and Technology Institute, USA
Tamal Mukherjee, Carnegie Mellon University, USA
Andrzej Napieralski, Technical University of Lodz, Poland
Ruth Pachter, Air Force Research Laboratory, USA
Michael G. Pecht, University of Maryland, USA
Marcel D. Profirescu, Technical University of Bucharest, Romania
PVM Rao, IIT Delhi, India
Philippe Renaud, Swiss Federal Institute of Technology of Lausanne, Switzerland
Marta Rencz, Technical University of Budapest, Hungary
Siegried Selberherr, Technical University of Vienna, Austria
Sudhama Shastri, ON Semiconductor, USA
Armin Sulzmann, Daimler-Chrysler, Germany
Mathew Varghese, The Charles Stark Draper Laboratory, Inc., USA
Dragica Vasilesca, Arizona State University, USA
Gerhard Wachutka, Technical University of Münich, Germany
Jacob White, Massachusetts Institute of Technology, USA
Thomas Wiegele, BF Goodrich Aerospace, USA
Wenjing Ye, Georgia Institute of Technology, USA
Sung-Kie Youn, Korea Advanced Institute of Science and Technology, Korea
Xing Zhou, Nanyang Technological University, Singapore

Conference Operations Manager

Sarah Wenning, Nano Science and Technology Institute, USA

In Association with

WCM 2005 2005 Workshop on Compact Modeling
WCM 2005
BioNano 2005 2005 NSTI Bio Nano Conference and Trade Show
BioNano 2005
ICCN 2005 2005 International Conference on Computational Nanoscience and Nanotechnology
ICCN 2005
ICCN 2005 2005 NSTI Nanotechnology Conference and Trade Show
Nanotech 2005
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