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696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
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EV Group

Booth: 1205

EV Group manufactures leading-edge wafer bonders, mask and bond aligners, photoresist coaters and cleaners for microelectromechanical systems (MEMS), Nanoimprint and semiconductor market segments. EV Group is known in the market with the longest experience in manufacturing aligned wafer bonding and double side lithography equipment for the MEMS industry and has the world’s largest installation base of Nanoimprinting equipment. EV Group provide total process solutions for all areas of nanoimprint lithography including flexible and cost-effective imprint equipment for high volume production and R&D, stamp and imprint resist know how. EV Group offers equipment for hot embossing, de-embossing to create ultra-fine micrometer or nanometer scale features by a high-quality pattern transfer from a stamp to a polymer substrate. Micro contact printing (µCP) and nanoimprint lithography (NIL) are possible on any of EV Group’s precision alignment systems to create nano patterns either with polymer materials and exposure to UV light or by an imprint process with a flexible stamp that deposits a pattern on a substrate. With the longest experience in manufacturing high contact force systems and a strong focus on advanced nano patterning, EV Group is at the forefront of new equipment solutions for nanoscale patterning.

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