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696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461

Surface Technology Systems PLC

Booth: 1401

Manufacturer of cassette-to-cassette cluster and single/batch loadlockedplasma etch and deposition systems that can be configured with ICP, RIE,XeF2 and CVD sources. Products include the market-leading ASEĀ® deepsilicon etch process for MEMS micromachining, which is also being utilizedby a growing number of international researchers and device manufacturersto etch silicon nanostructures with controlled profile and low CD loss athigh aspect ratios. STS also supplies a range of dielectric etch anddeposition processes for optical waveguides, and GaAs, InP and GaN etchprocesses for LED, VCSELs, LASER and wireless applications. All STS'process technologies are available on a range of platforms which give alogical upgrade path from R&D and pilot production to volume production,without the need for process re-qualification. Lifetime process support,from a dedicated Process Engineering Team based in the UK headquarters, isavailable to all customers, and comprehensive service and spares support isoffered through a worldwide network of STS Service Centres and qualifiedagents.

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