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FEI Company

Booth: 1101

FEI Company is an industry leader serving diverse nanotechnology markets. Our SEMs, TEMs, and DualBeam™ FIB/SEM instruments enable advanced, three-dimensional metrology, device modification, structural analysis, prototyping, characterization, and diagnostics on structures at nanoscale dimensions. Our new Nova™ NanoLab DualBeam is a complete nanotechnology lab in a single tool, ideal for nanoscale machining, prototyping, characterization, and analysis of complex structures below 100 nm.

Our new Strata™ DB-STEM, designed especially for semiconductor and data storage labs, delivers integrated sample preparation, ultra-high resolution STEM imaging, and microanalysis below 1 nm. Our Tecnai TEM series supports structural research applications down to the atomic scale. Software enhancements for Tecnai TEM includes new Xplore3D™ software to automate the process of 3D tomography, including data collection, reconstruction, visualization and analysis; and new TrueImage™ software to deliver improved atomic scale materials characterization.

FEI’s has leveraged its core technologies—focused ion and electron beams, beam gas chemstries, and automation—to provide soutions that open up the third dimention to nanotechnology researchers, giving them access to structures and materials that lie below the surface, and enabling them to achieve breakthroughs and mass produce leading-edge nanoscale products. FEI solutions deliver more critical data faster than other metrology and analysis methods, reducing costs, improving yields, and speeding time-to-market.

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