Surface Micromachined Viscous Spiral Pump
M. I. Kilani, P. G. Galambos, Y. Haik, C. J. Chen
Biomagnetic Engineering Lab, US
Keywords: pump, spiral
This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.
NSTI Nanotech 2003 Conference Technical Program Abstract