Introduction of micro-manipulation by adhesional force and dielectric force
Kunio TAKAHASHI, Yujia AN, Shigeki SAITO, Tadao ONZAWA
Tokyo Institute of Technology, JP
Keywords: manipulation, particle, adhesion, Coulomb interaction
This paper reports the manipulation by both adhesional force and Coulomb force. Applicability of this method is discussed evaluating both of the forces theoretically and experimentally.
Adhesional force can be used as attractive force in manipulation. Coulomb interaction seems a most useful mechanism for generating repulsive force. Boundary element method (BEM) is used to evaluate the forces generated by Coulomb interaction. Calculated results are compared with experimental data. Using above evaluation, the threshold between for adhesion ( pick-up ) and electro-detachment ( place ) can be clearly expressed.
NSTI Nanotech 2003 Conference Technical Program Abstract