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A Systematic Approach to Macromodeling Complex MEMS Devices

G. Casinovi
Georgia Tech, US

Keywords: MEMS, modeling, simulation

This paper describes a modeling methodology for arbitrary MEMS devices based on the concept of element stamps. Previously published work has shown that element stamps can be used profitably to build models of MEMS devices into simulators, including coupled-energy-domain models. This paper builds upon those earlier results to develop a systematic approach to lumped-constant modeling of arbitrarily complex MEMS devices. In particular, it is shown that stamps can be used to represent the dynamical behavior of microelectromechanical elements whose motion is restricted by arbitrary mechanical constraints. Many composite MEMS structures are built from a common set of basic elements, such as beams, anchors and plates, that impose a variety of constraints on the relative motion of the basic elements of the device. It is shown that the equations describing the dynamics of rigid bodies, as well as any mechanical constraints which they are subject to, can be represented by means of stamps. Since stamps can also be used to describe the electrical behavior of a device, the approach described in this paper allows the systematic development of models for a large variety of MEMS components, and their seamless integration into simulators capable of handling indifferently mechanical, electrical or electromechanical devices.

NSTI Nanotech 2003 Conference Technical Program Abstract

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