Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2003 NSTI Nanotechnology Conference & Trade Show
Nanotech 2003
BioNano 2003
Index of Authors
2003 Sub Sections
Press Room
NSTI Events
Site Map
Nanotech Proceedings
Nanotechnology Proceedings
Supporting Organizations
Supporting Organizations
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461

Diamond Replicas on Silicon Substrate

M. C. Salvadori, D. R. Martins, R. Mansano, P. Verdonck
University of Sao Paulo, BR

Keywords: diamond, replica

Most microelectromechanical system (MEMS) devices have been based on silicon. This is due to the technological know-how accumulated on the manipulation, machining and manufacturing of silicon. However, the silicon properties are poor, especially when compared with diamond. Therefore, fabrication of diamond microstructures is a promising field for MEMS. This work was done in order to investigate the possibility of fabricating diamond microstructures. Our technique can be describe as follows: in the first step, the silicon mold is microfabricated using well established process technology, in the second step a diamond film is grown on it and, finally, the silicon substrate is wet etched. In this way we obtained diamond replicas of silicon molds, as the final devices. An Atomic Force Microscope performed the micrometric and nanometric characterization of the replicas and the substrates, defining limits for the morphology mold reproduction in the diamond replicas. The diamond replica roughness introduces an uncertainty in the measured heights, which implies that the reproducibility of diamond replicas morphology depends on the substrate preparation. With this limitation, we observed that diamond replicas can reproduce microstructures, but it has serious limitations for the nanometric scale.

NSTI Nanotech 2003 Conference Technical Program Abstract

Featured Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact