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Binary Chemical Nanopatterns: Fabrication and Use as Templates for Electrostatic Self-Assembly

G. Baralia, A. M. Jonas, E. Nicol, B. Nysten, A. Pallandre
Université catholique de Louvain, BE

Keywords: nano-patterning, polyelectrolyte multilayers, e-beam lithography

We report on surface-directed macromolecular self-assembly at the nanoscale, starting from 2D templates produced by combining electron beam nanolithography with surface chemistry. As assembly process, we concentrate on electrostatic self-assembly, which allows to grow functional multilayers by the successive adsorption of polyelectrolytes of opposite charge. The fabrication of 2D binary templates starts with the creation of nanopatterned masks by electron beam lithography. Then, gas phase deposition of organic monolayers on the unmasked parts of the substrates is performed. A second deposition is then realized after dissolution of the mask, followed if so required by chemical post-modification of the organic monolayers. The fabrication and characterization of these templates will be reported in detail. Attempts to grow polyelectrolyte multilayers on the patterned substrates were then realized, using the electrostatic self-assembly method. We show that control of multilayer growth can at least be performed at the 100 nm scale, even smaller features being currently tested in our group. Finally, we discuss rapidly potentialities afforded by growing multilayers on such patterned substrates, pointing out ways to dope these multilayers by small organic functional molecules.

NSTI Nanotech 2003 Conference Technical Program Abstract

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