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Nano Science and Technology Institute 2000 NSTI Nanotechnology Conference & Trade Show
Nanotech 2000
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Nanotech 2000 Technical Program - Tuesday March 28

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Keynote lecture

Grand Ballroom
Session chair: Dragica Vasileska, Arizona State University
8:30 Ultrasmall Devices: Are We Ready for Quantum Effects?
D.K. Ferry
Arizona State University, USA


Grand Ballroom Foyer

Quantum Devices

Grand Ballroom I
Session chair: Dragica Vasileska, Arizona State University
9:30 Modeling Artificial Molecules Composed of Coupled Quantum Dots
R. Akis and D. Vasileska
Arizona State University, USA
9:50 Self-Consistent Calculations of Spatial Electron Densities in Quantum Dots Using a Coupled Recursive Green’s Function and Poisson Solver
F. Badrieh and D.K. Ferry
Arizona State University, USA
10:10 Ensemble Monte Carlo Simulation of Raman Scattering in an AlxGa1-xAs System to Determine the Relative Strength of the Polar Optical Modes
L. Shifren and D.K. Ferry
Arizona State University, USA
10:30 Electron Vortices in Semiconductor Devices
K. Mohseni, A. Shakouri and R.J. Ram
California Institute of Technology, USA
10:50 Hybrid CA/Monte Carlo Modeling of Charge Transport in Semiconductors
M. Saraniti, S.M. Goodnick and S.J. Wigger
Arizona State University, USA
11:10 Long-Range Coulomb Interactions in Small Silicon Devices: Transconductance and Mobility Degradation
M.V. Fischetti and S.E. Laux
IBM Research Division, USA

Signal Integrity Simulation and Verification

Pavillion Ballroom
Session chair: Matthew Laudon, Motorola
9:30 Inductance Calculation in Interconnect Structures
C. Harlander, R. Sabelka and S. Selberherr
Technical University of Vienna, AUSTRIA
9:50 Influence of Element Size on the Precision and Required Computational Effort for 3D FEM Interconnect Capacitance Simulations of ULSI DRAM Cells
A. Hieke
Infineon Technologies Corp., USA
10:10 Hybrid P-Element and Trefftz Method for Capacitance Computation
M. Gyimesi, J-S. Wang, and D.F. Ostergaard
10:30 Wavelet Based Matrix Compression in Numerical Micromagnetics
T. Schrefl, D. Süss and J. Fidler
Vienna University of Technology, AUSTRIA
10:50 Transient Simulation of Ferroelectric Hysteresis
K. Dragosits, R. Hagenbeck and S. Selberherr
Technical University of Vienna, AUSTRIA
11:10 A Methodology for Modeling a Complex Geometry on Wafer from a Layout Data
S. Yoon, O. Kwon and T. Won
Inha University, KOREA

System-Level Modeling and Simulation of MEMS

Grand Ballroom II
Session chair: G.K. Fedder, Carnegie Mellon University, U.S.A.
9:30 System Level Simulation of an Electrostatically Levitated Disk
M. Kraft and A. Evans
University of Southampton, UNITED KINGDOM
9:50 Compact MEMS Modeling for Design Studies
P. Voigt and G. Wachutka
University of Technology, GERMANY
10:10 Methodology of Macromodeling Demonstrated on Force Feedback S/D-Architectures
M. Hardtmann, R. Aigner, R. Nadal and G. Wachutka
Munich University of Technology, GERMANY
10:30 Towards Microelectrofluidic System (MEFS) Computing and Architecture
A. Dewey, R. Fair, J. Jopling, J. Ding, T. Zhang, F. Cao, B. Schreiner and M. Pollack
Duke University, USA
10:50 Macro-Modeling of Systems Including Free-Space Optical MEMS
T.P. Kurzweg and A.S. Morris
Uiversity of Pittsburgh, USA
11:10 Layout Synthesis of CMOS MEMS Accelerometers
V. Gupta and T. Mukherjee
Carnegie Mellon Universtiy, USA



Compact Modeling for Deep Submicron - 1

Grand Ballroom I
Session chair: Xing Zhou, Nanyang Technological University, Singapore
13:20 Verilog-AMS Eases Mixed Mode Signal Simulation
I. Miller and T. Cassagnes
Motorola ESD Europe, USA
13:40 A Novel Method for the De-Embedding of S-Parameters of Double Heterojunction d-doped PHEMTs - Modeling and Measurements
R.V.V.V.J. Rao, J. Joe, Y.W.M. Chia, K.S. Ang, H. Wang and G.I. Ng
National University of Singapore , SINGAPORE
14:00 Modeling of On-Chip Simultaneous Swithcing Noise in VDSM CMOS Circuits
K.T. Tang and E.G. Friedman
University of Rochester, USA
14:20 Modeling of Threshold Voltage with Reverse Short Channel Effect
K.Y. Lim, X. Zhou and Y. Wang
Nanyang Technological University, SINGAPORE
14:40 Behavioral Models and Specific Design Tool for New Power Integrated Devices
T. Bordingnon, J.L. Sanchez, P. Austin and V. Houdbert
15:00 Improved Prediction of Length/Temperature-Dependent Impact Ionization Induced Body Current Based on an Accurate Saturation Drain Voltage Model
S.H.L. Seah, K.S. Yeo, J.G. Ma and M.A. Do
Nanyang Technological University, SINGAPORE
15:20 Analytical Results for the Current-Voltage Characteristics of an SOI-MOSFET
H.C. Morris, E. Cumberbatch, T. Phillips and B. Hinderberger
Claremont Graduate University, USA

Equivalent Circuits, Behavioral and Multi-Level Simulation

Grand Ballroom II
Session chair: Thomas Wiegel, BF Goodrich Aerospace, U.S.A.
13:20 Development of an FET Pressure Sensor Model and used to Predict Sensor Behaviour as a Function of Electrode Geometry
E. Hynes, P. Elebert, M. O’Neill, H. Berney, W.A. Lane, G. Kelly and M. Hill
Analog Devices, IRELAND
13:40 An Improved BDJ Photodetector Physical Model Implemented Under SPICE
A. Alexandre, M. BenChouikha, M. Sedjil and G. Alquié
Université Pierre et Marie Curie, FRANCE
14:00 Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level
G. Schrag, G. Zelder, and G. Wachutka
Munich University of Technology, GERMANY
14:20 Integration of a Permeable Layer into Micro Coil Modelling and First Steps of Automatic Optimization
S. Rehfuss, D. Peters and R. Laur
University of Bremen (ITEM), GERMANY
14:40 Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM
H.J. Lee, S.B. Crary, B Affour, D. Bernstein, Y.B. Gianchandani, D.M. Woodcock and M.A. Maher
15:00 Low Order Squeeze Film Model for Simulation of MEMS Devices
S. Vemuri, G.K. Fedder and T. Mukherjee
Carnegie Mellon Universtiy, USA
15:20 A Method for Thermal Model Generation of MEMS Packages
M. Rencz, V. Székely, Zs. Kohári and B. Courtois
Micred Ltd., HUNGARY
15:40 Techniques for Coupled Circuit and Micromechanical Simulation
J. Chen and S-M. Kang


Grand Ballroom Foyer

Poster Session (A)

Grand Ballroom Foyer

Applications: Electromagnetics, Optics, Imaging

Grand Ballroom Foyer
- Modeling and Simulation of a Permanent Magnet Array in Elliptical Configurations
S.J. Lee and D.C. Jiles
Iowa State University, USA
- Micromirror Array Design and Simulation
M. Huja and M. Husak
Czech Technical University in Prague, CZECHOSLOVAKIA
- Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures
J.L. Kuhn, S.B. Dutta, M.A. Greenhouse and D.B. Mott
NASA/Goddard Space Flight Center, USA
- Numerical Simulations to Predict the Functionality of Optical Devices
K.P. Scherer, H. Eggert, H. Guth, I. Sieber and P. Stiller
Forschungszentrum Karlsruhe, GERMANY

Applications: Microfluidics

Grand Ballroom Foyer
- Theoretical Approximations for the Average Linear Flow of Carrier Gas Through a Rectangular GC Column
G.E. Spangler
Technispan LLC, USA
- Application of the Gaseous Cross Phenomena to Microfluidics
F. Sharipov
Universidade Federal do Parana, BRAZIL
- Data on the Slip Coefficients
F. Sharipov
Universidade Federal do Parana, BRAZIL
- Design, Fabrication and Experimental-Numerical Study of PZT Sensors
M. Arik, S.M. Zurnx, K.S. Yigit, and A. Bar-Cohen
University of Minnesota, USA
- Air-damping Effect on a Micro- and Nano-machined Beam Resonator
G. Xu, C. Zhang and Q. Jiang
University of California, USA
- Hydrodynamic Force on a Plate Near the Plane Wall
M.U. Kim, K.W. Kim, J.H. Kim and B.M. Kwak
- Impact of Microdrops on Solid Surfaces for DNA-Synthesis
C. Maier, S. aus der Wiesche and E.P. Hofer
University of Ulm, GERMANY
- Computational Studies of Membrane-Based Test Formats
S. Krishnamoorthy, V.B. Makhijani, M. Lei, M.G. Giridharan and T. Tisone
CFD Research Corporation, USA
- A Comparison of the Behavioral Characteristics of Miniature Gas Flow Sensors
P. Cousseau, O. Dubochet, Ph. Lerch and Ph. Renaud
Swiss Federal Institute of Technology, SWITZERLAND

Applications: Micropumps, Heaters and Coolers

Grand Ballroom Foyer
- Dynamic Analysis of an Electrostatic Micropump
T.Y. Jiang, T.Y. Ng and K.Y. Lam
National University of Singapore, SINGAPORE
- Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements
N-T. Nguyen and X. Huang
Nanyang Technological University, SINGAPORE
- Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool
D. Briand, M.-A. Grétillat, B. van der Schoot and N.F. de Rooij
Institute of Microtechnology, SWITZERLAND
- Simulation of Heat-Transfer Enhancement Effects in Microreactors
S. Hardt, W. Ehrfeld, V. Hessel and K.M. Vanden Bussche
Institut für Mikrotechnik Mainz GmbH, GERMANY
- Simulation and Experimental Verification of Micro Polymerase Chain Reaction Chip
Y-C. Lin, C-C. Yang, M-Y. Hwang and Y-T. Chang
Cheng Kung University, TAIWAN
- Numerical Evaluation of a Silicon Microscale Heat Exchanger
J. Bergkvist, J. Bengtsson, T. Laurell and J. Nilsson
Lund Institute of Technology, SWEDEN
- Modelling of Integrated Peltier Elements
D.D.L. Wijngaards, E. Cretu, S.H. Kong and R.F. Wolffenbuttel

Applications: Pressure, Actuation, Navigation

Grand Ballroom Foyer
- Analysis of Anodic Bonding and Packaging Effects in Micro Sensors
T-K. Shing
Industrial Technology Research Institute, TAIWAN
- Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications
A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh
Purdue University, USA
- Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment
Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen
National University of Singapore, SINGAPORE
- On Design of a Backplate Used in a Hearing Aid
N.L. Pedersen
Technical University of Denmark, DENMARK
- Solving of Electro-Mechanical Coupled Field Problem with FEM
K. Ruokonen, T. Lamminmäki and I. Tittonen
Helsinki University of Technology, FINLAND
- Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer
G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu
Peking University, CHINA

Characterization, Parameter Extraction, Calibration

Grand Ballroom Foyer
- Auto-Regressive Time Series Modeling of Stochastic Surfaces
B.N.P. Rao and V.S.R. Murti
Osmania University, INDIA
- Atomic Force Microscopic Visualization of Identical Site on Cell Surface with Different Probes
Y. Ohta, T. Kobayashi, H. Okamoto and T. Okuda
Toyo University, JAPAN
- Modelling of Processes of Photoacoustic Diagnostic with Piezoelectric Detection
O. Vertsanova, I. Perlov and B. Tsyganok
National Technical University of Ukraine, UKRAINE
- Finite-Element Modeling of 3C-SiC Membranes
R.G. DeAnna, J. Mitchell, C.A. Zorman and M. Mehregany
U.S. Army Research Laboratory, USA
- Vision-based Extraction of Geometry and Forces from Fabricated Micro Devices
X. Wang, G.K. Ananthasuresh and J.P. Ostrowski
University of Pennsylvania, USA
- Nonlinearity and Materials Aspects of Thermal Microsensor Operation: The Influence of Biasing Conditons
L.A. Almeida, G.B. Brandao, A.M.N. Lima, G.S. Deep, R.C.S. Freire and H. Neff
Universidade Federal da Paraiba, BRAZIL
- Modeling of Acoustic-Structural Coupling in a MEMS Hydrophone
H.T. Johnson and L. Prévot
Boston University, USA
- Design, Simulation and Fabrication of a Bridge Structure Microtransducer
M. Zanga, S.M. Zurn, D.L. Polla, B.J. Nelson and W.P. Robbins
University of Minnesota, USA
- Topics in Finite-Element Modeling of Piezoelectric MEMS Devices
F.J. von Preissig and E.S. Kim
University of Hawaii at Manoa, USA
- Torsional Ratcheting Actuating System
S.M. Barnes, S.L. Miller, M.S. Rodgers and F. Bitsie
Sandia National Laboratories, USA
- Calculation of the AC Electroquasistatic Sinusoidal Steady-State Coulomb Force on a Conductor Coated with a Lossy Dielectric
P. Osterberg and A. Inan
University of Portland, USA
- Analysis of an Electrostatic Microactuator with the Help of Matlab/Simulink: Transient and Frequency Characteristics
O. Francais
- Resonant-Type Micro-Probe for Vertical Profiler
E. Lebrasseaur, T. Bourouina, J-B. Pourcie, M. Ozaki, T. Masuzawa and H. Fujita
- Automatic Differentiation Technique in Device Model Parameter Extraction
B. Cheng, Z. Shao, L. Wang, T. Tang and Z. Yu
Xi'an Jiaotong University,, CHINA
- Triboelectromagnetic Phenomena at a Simulated Material Combination of a Head/Magnetic-Recording-Disk
K. Nakayama
Mechanical Engineering Laboratory, JAPAN
- 3D Thermo-Electro-Mechanical Simulations of Gas Sensors Based on SOI Membranes
C-C. Lu, D. Setiadi, F. Udrea, W.I. Milne, J.A. Covington and J.W. Gardner
Cambridge University, UNITED KINGDOM
- Simulating IMD in SiGe HBTs: How good are our models?
P. Wong and B. Pejcinovic
Portland State University, USA

Computational Materials

Grand Ballroom Foyer
- Simulations for Optimized Piezoresistors
D. Mladenovic and D. Vasileska
Motorola, USA
- Monte Carlo Simulation Study of Mechanical Properties of Au Nanowires
S. Tanimori and S. Shimamura
Yamaguchi University, JAPAN
- Numerical Simulation of Periodical Distribution of Antisite Defects in Irradiated Semiconductors
V.V. Mykhaylovskyy, K.C. Russell and V.I. Sugakov
Academy of Science of Ukraine, UKRAINE
- Contribution of Hexagonal-like Structure to the Nonlinear Optics in SiC Nanocrystalites
K.J. Plucinski, I.V. Kityk and A. Kassiba
Miltary University of Technology, POLAND
- Theoretical Study of Initial Reactions of TiN Chemical Vapor Deposition
M. Siodmiak, K.P. Novoselov, L.L. Savchenko, G. Frenking and A. Korkin
Philipps-Universitat Marburg, GERMANY
- Computing Isomeric Higher and Smaller Fullerenes: Materials Controlled by a Profound Enthalpy/Entropy Interplay
X. Zhao, Z. Slanina, and E. Osawa
Toyohashi University of Technology, JAPAN
- Recent Experimental and Computational Reliability Analysis Results for On-Chip Copper Interconnect Structures
S.R. Runnels, R.A. Page, M. Enright, H. Millwater, Y. Feng


Grand Ballroom Foyer

Poster Session (B)

Garden Room

Equivalent Circuits, Behavioral and Multi-Level Simulation

Garden Room
- Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators
T. Lamminmäki, K. Ruokonen, I. Tittonen, T. Mattila, O. Jaakkola, A. Oja, H. Seppä, P. Seppälä and J. Kiihamäki
Helsinki University of Technology, FINLAND
- A FEM Based Network Approach for the Simulation of Miniaturized Electromagnetic Devices
R. Gollee and G. Gerlach
Dresden University of Technology, GERMANY
- A Synthesizable Low Power VHDL Model of the Exact Solution of Three Dimensional Hyperbolic Positioning System
R. Bucher and D. Misra
New Jersey Center for Wireless and Telecommunication, USA
- Compact Models for Smart Pixels with Smart Illumination
Y. Subramanian, M. Azadeh and R.B. Darling
University of Washington, USA
- Hardware Realization of Biological Mechanisms Using VHDL and FPGAs
N. Botros, M. Akaaboune, J. Alghazo and M. Alhreish
Southern Illinois University, USA
- Modeling of High-speed Diamond Microswitch
P. Schmid, M. Adamschik, S. Ertl and E. Kohn
University of Ulm, GERMANY

Numerics, Algorithms

Garden Room
- Co-simulation and Optimization Micro Electro Mechanical Systems by Using Method of Theoretical Investigation
V. Mkrttchian
State Engineering University of Armenia, ARMENIA
- Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing
V.I. Zhulin, S.J. Owen and D.F. Ostergaard
- A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes
D.T.K. Kwok, Z.M. Zeng and P.K. Chu
City University of Hong Kong, CHINA
- Nonlocal Problems in MEMS Device Control
J.A. Pelesko and A.A. Triolo
Georgia Institute of Technology, USA
- Closed-Loop, Neural Network Controlled Accelerometer Design
E.I. Gaura, N. Ferreira, R.J. Rider, and N. Steele
Coventry University, UNITED KINGDOM
- A Mathematical Model for Process Control in Laser Chemical Vapor Deposition
R. Nassar, W. Dai, C. Zhang, H. Lan and J. Maxwell
Louisiana Tech University, USA
- Discrete Impurity Effects in Silicon Quantom Dots
S.N. Milicic, D. Vasileska, R. Akis, A. Gunther and S.M. Goodnick
Arizona State University, USA

Process Modeling

Garden Room
- Modeling of Focused Ion Beam Trimming of Cantilever Beams
T. Lam and R.B. Darling
Univeristy of Washington, USA
- Self-Adapting Vertices for Mask-Layout Synthesis
C-Y. Lee and E.K. Antonsson
California Institute of Technology, USA
- Computer Simulation from Electron Beam Lithography to Optical Lithography
Z. Cui
Rutherford Appleton Laboratory, UNITED KINGDOM

Semiconductor Device Modeling

Garden Room
- Study of Voltage Tunable Asymmetric Quantum Well Structure for Infrared Detection
P.R. Vaya, S. Ananda Natarajan and K.R. Srinivasan
Indian Institute of Technology, INDIA
- Modelling Multilayer Semiconductor Structures
K. Brecl and J. Furlan
University of Ljubljana, SLOVENIA
- Study of Well Barrier Hole Burning in Quantum Well Bistable Lasers
M. Ganesh Madhan, P.R. Vaya and N. Gunasekaran
Anna University, INDIA
- Equation of p-n Junction for High Current Density Models of Transistor
A. Baskys
Semiconductor Physics Institute, LITHUANIA
- The 2.4F2 Memory Cell Technology with Stacked-Surrounding Gate Transistor (S-SGT) DRAM
M. Suzuki, T. Endoh, H. Sakuraba and F. Masuoka
Tohoku University, JAPAN
- Inverse Modeling for C-V Profiling of Modulated-Doped Semiconductor Structures
M.F. Kokorev, N.A. Maleev and D.V. Pakhnin
State Electrotechnical University, RUSSIA
- A Velocity-Overshoot Subthreshold Current Model for Deep-Submicrometer MOSFET Devices
W. Qian, X. Zhou, Y. Wang, and K.Y. Lim
Nanyang Technological University, SINGAPORE
- Modelling of the Electrical and Piezoresistive Properties of Laser-Recrystallized Polysilicon Layers
A. Druzhinin, I. Gortynska, E. Lavitska and I. Maryamova
Lviv Polytechnical University, UKRAINE
- Monte-Carlo Simulation of GaAs Devices Using High Generality Object-Oriented Code and Encapsulated Scattering Tables
J. Harris and D. Vasileska
Arizona State University, USA
- A Mathematical Model for the Threshold Voltage of a Partially and Fully Depleted MOS/SOI Structure with a Gaussian Distribution in the Film
C. Ravariu, A. Rusu, D. Dobrescu, L. Dobrescu, F. Ravariu, C. Codreanu and M. Avram
University of Bucharest, ROMANIA
- Modelling of Atmosphere Sensitive Heterojunctions for Device Applications
G. Mangamma and T. Gnanasekaran
Indira Gandhi Centre For Atomic Research, INDIA
- Squeezed Electrons in GaN Quantum Wells
B.K. Ridley, N.A. Zakhleniuk and C.R. Bennett
University of Essex, UNITED KINGDOM

Software Tools, CAD Systems

Garden Room
- Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)
D.F. Ostergaard and M. Gyimesi
- Modeling and Simulation of 3D Structures for Gigabit DRAM
O. Kwon, S. Yoon, Y. Ban and T. Won
Inha University, KOREA
- A New Analytical Micromotor Design Models for CAD PC-Design Tools
A. Salman, A. Napieralski and G. Jablolski
Technical University of Lodz, POLAND
- 3D MEMS Design via Matlab Interactive Plots
N.R. Lo and K.S.J. Pister
University of California, USA
- Wafer Fabrication Process Simulation Including Cost: Which Should be Used in an In-Line Wafer Inspection Strategy, High Sensitivity and High Cost Inspection Machine or Low Sensitivity and Low Cost Inspection Machine?
K. Nakamae, S. Yamaji and H. Fujioka
Osaka University, JAPAN
- High-Fidelity and Reduced Models of Synthetic Microjets
A.J. Przekwas, M. Turowski and Z. Chen
CFD Research Corp., USA
- Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods
S. Reh, P. Lethbridge and D.F. Ostergaard
- CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations
Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas
CFD Research Corp., USA
- GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS
N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
Stanford University, USA
- Numerical Simulation of Micro Assembly Techniques in MEMS Devices
N. Finch, D. Keating and Y. He
IntelliSense Corp., USA
- Modified Nodal Analysis for MEMS with Multi-Energy Domains
J.V. Clark, N. Zhou and K.S.J. Pister
University of California at Berkeley, USA
- A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems
M.Z. Pindera, S. Bayyuk, V. Upadhya and A.J. Przekwas
CFD Research Corp., USA
- Analysis of Realistic Large MEMS Devices
P. Ljung, M. Bächtold and M. Spasojevic
Coyote Systems, Inc., USA

System-Level Modeling and Simulation of MEMS

Garden Room
- Electrostatic Spring Effect on the Dynamic Performance of Micro Resonators
E.H. Francis, R. Kumaran, B.L. Chua and V.J. Logeeswaran
National University of Singapore, SINGAPORE
- Investigation of the Dynamics of Microdevices - As a Design Tool
D.J. Seter, O. Degani, S. Kaldor, E. Scher and Y. Nemirovsky
RAFAEL Microsystems Group, ISRAEL
- Compact Damping Models for Lateral Structures Including Gas Rarefaction Effects
T. Veijola
Helsinki University of Technology, FINLAND
- Modeling and Optimization of Bi-stable Optical Switch
H. Maekoba, P. Helin, G. Reyne, T. Bourouina and H. Fujita
Cybernet Systems Co. Ltd., JAPAN
- HDL-A-Model of a Micromachined Tuning Fork Gyroscope
J. Eichholz, J. Quenzer, O. Schwarzelbach, M. Weiss and B. Wenk
- Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications
A. Mohamed, H. Elsimary and M. Ismail
Ohio State University, USA
- Phase-Lead Compensator to Improve the Transient Performance of Comb Actuators
Y. Chen, Y. Shroff and W.G. Oldham
University of California, USA
- Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
H. Xie, L. Erdman, Q. Jing and G.K. Fedder
Carnegie Mellon University, USA

Banquet Dinner

Grand Ballroom
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