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Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications

Mehran Mehregany

Mehran Mehregany

Chairman, Electrical Engineering and Computer Science
Goodrich Professor of Engineering Innovation
Case Western Reserve University, USA

Mehran Mehregany received his B.S. in Electrical Engineering from the University of Missouri in 1984, and his M.S. and Ph.D. in Electrical Engineering from Massachusetts Institute of Technology in 1986 and 1990, respectively. From 1986 to 1990, he was a consultant to the Robotic Systems Research Department at AT&T Bell Laboratories, where he was a key contributor to ground-breaking research in microelectromechanical systems (MEMS). In 1990, he joined the Department of Electrical Engineering and Applied Physics at Case Western Reserve University as an Assistant Professor. He was awarded the Nord Assistant Professorship in 1991, was promoted to Associate Professor with tenure in July 1994, and was promoted to Full Professor in July 1997. He held the George S. Dively Professor of Engineering endowed chair from January 1998 until July 2000, when he was appointed the Goodrich Professor of Engineering Innovation. He served as the Director of the MEMS Research Center at Case from July 1995 until December 2002. Since January 2003, Professor Mehregany has been serving as Chairman of the Electrical Engineering and Computer Science Department.

Professor Mehregany is well known for his research in micro/nano systems, and his work has been widely covered by domestic and foreign media. He has over 250 publications describing his work, holds 15 U.S. patents, and is the recipient of a number of awards/honors. He served as the Editor-in-Chief of the Journal of Micromechanics and Microengineering from January 1996 to December 1997, is on the Editorial Board of the IEEE-ASME Journal of Microelectromechanical Systems, and is Assistant-to-the-President of the Transducers Research Foundation. Professor Mehregany is the founder/co-founder of several technology companies, including Advanced Micromachines Incorporated (now part of The Goodrich Corporation), FLX Micro, Inc. (, and NineSigma, Inc. (

Speaking in the Sensors and Systems Symposium.

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