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A Designer’s Guide to CMOS MEMS

Gary K. Fedder

Gary K. Fedder

Professor of Electrical and Computer Engineering and Robotics,
Department of Electrical and Computer Engineering,
Carnegie Mellon University, USA

Gary K. Fedder was born in St. Louis, Missouri in 1960. He received the B.S. and M.S. degrees in electrical engineering from Massachusetts Institute of Technology in 1982 and 1984, respectively. In 1994, he received the Ph.D. degree in electrical engineering from the University of California at Berkeley, where his research focused on process development, modeling, and simulation for polysilicon surface microsystems. He joined the faculty of Carnegie Mellon University in October 1994 as an Assistant Professor holding a joint appoinment with the Department of Electrical and Computer Engineering and the Robotics Institute. From 1984 to 1989, he worked at the Hewlett-Packard Company on a VLSI integrated-circuit test system and on modeling of printed-circuit-board interconnect for high-speed computers. He received the 1993 AIME Electronic Materials Society Ross Tucker Award in recognition of his work on MEMS digital multi-mode control. His present research interests include surface-micromachined MEMS in standard CMOS processes, physical design tools for MEMS, embedded microsensor packaging, and microrobotics.

Speaking in the Sensors and Systems Symposium.

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