Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics

MEMS & NEMS Devices & Applications Chapter 1

Hermetic room temperature glass welding technology

Authors: H. Lunden, T. Kumpulainen, A. Määttänen, J. Vihinen

Affilation: Primoceler Ltd, Finland

Pages: 13 - 16

Keywords: hermetic, glass welding, room temperature, shear strength

The aim of this study was to find an alternative method for conventional glass-glass bonding. The goal was to minimize heat affect, shorten process time, and avoid use of additive materials but still obtain excellent mechanical and chemical properties. In this paper, a novel glass welding technique is analyzed and its shear strength compared to adhesive glass-glass bonding. Primoceler Felix microwelding machine was used for the laser welding of borosilicate samples. Welding was implemented on the material interface, leaving the surfaces untouched. Adhesive bonds were performed with UV cured glue. A shear test following the standard MIL-STD-883, method 2019.7, was executed. Glued samples reached the average shear strength of 8 MPa, and the glue was sheared off the bottom glass. In the case of welded samples, the welded glass gained 20 MPa before the bottom glass fractured. The results confirm that properties obtained with novel laser welding method are consistently better than properties with conventional glass bonding methods. Furthermore, room temperature welding produces hermetic glass encapsulation without additive materials.

ISBN: 978-1-4822-5827-1
Pages: 570
Hardcopy: $209.95

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