Nano Science and Technology Institute
Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
Chapter 1: MEMS & NEMS Devices & Applications

Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Authors:V. Rochus, M. Farghaly, X. Rottenberg, H.A.C. Tilmans
Affilation:imec, BE
Pages:41 - 44
Keywords:magnetometer, resonator, equivalent model, optimization
Abstract:This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port network. More specifically, the optimization is performed thanks to an equivalent circuit that models the electro-magneto-mechanical behavior of the magnetometer.
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