Nano Science and Technology Institute
Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
 
Chapter 1: MEMS & NEMS Devices & Applications
 

Local Synthesis of CuO Nanowires on CMOS Microhotplates for Gas Sensing Applications

Authors:S. Steinhauer, T. Maier, G.C. Mutinati, K. Rohracher, J. Siegert, F. Schrank, A. Koeck
Affilation:Materials Center Leoben Forschung GmbH, AT
Pages:53 - 56
Keywords:CuO, nanowire, gas sensor, integration
Abstract:CuO nanowires are locally synthesized on CMOS microhotplates leading to the realization of functional gas sensing devices. Only approximately 20mW are needed in order to heat the CMOS microhotplates to a temperature around 350°C, which is suitable for the growth of CuO nanowires with small diameters between 10nm and 30nm by thermal oxidation of Cu microstructures. By this method, direct CuO nanowire device integration can be achieved without the necessity of post-processing steps. First results show that ppm-level concentrations of the toxic gas carbon monoxide CO (10ppm, 50ppm and 100ppm) can be clearly detected validating the good gas sensor performance suitable for safety applications. Our approach combines miniaturization, low power consumption and CMOS integration, which are crucial factors for the future realization of smart gas sensors for daily life applications.
ISBN:978-1-4822-5827-1
Pages:570
Hardcopy:$209.95
 
Order:Mail/Fax Form
Up
© 2014 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map