Authors: S.P. Mao, X. Rottenberg, V. Rochus, P. Helin, A. Verbist, S. Severi, B. Nauwelaers, H.A.C. Tilmans
Affilation: IMEC, Belgium
Pages: 81 - 84
Keywords: cMUT, equivalent circuit modeling, acoustic characterization
This paper presents the modeling, simulation and experimental verification of the transmit and receive properties of a single cell capacitive micromachined ultrasonic transducer (cMUT). It is a confirmation that the equivalent circuit model provides a sound model as the results predicted by the model that are in rather good agreement with both FEM and experimental results, and this for a single cMUT cell operated in both transmit and receive mode. The equivalent circuit model thus provides an easy way to rapidly predict the behavior of cMUT cells of arbitrary shape. The model can further be adapted and used to study a family of cells as used in elements or arrays.