Nano Science and Technology Institute
Nanotech 2014 Vol. 2
Nanotech 2014 Vol. 2
Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
 
Chapter 1: MEMS & NEMS Devices & Applications
 

Simple and Accurate Formula for the Electrostatically Actuated Curled Beam Problem

Authors:M. Younis
Affilation:SUNY Binghamton, US
Pages:77 - 80
Keywords:curled cantilever beams, pull-in, analytical expressions
Abstract:We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed deformed beams configurations: the curled and tilted configurations. The derived analytical formulas are validated by comparing their results to experimental data in the literature and numerical results of a multi-mode reduced order model. The derived expressions do not involve any complicated integrals or complex terms and can be conveniently used by designers for quick, yet accurate, estimations. The formulas are found to yield accurate results for most commonly encountered microbeams of initial tip deflections of few microns.
ISBN:978-1-4822-5827-1
Pages:570
Hardcopy:$209.95
 
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