Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

NanoFab: Manufacturing & Instrumentation Chapter 6

Patterning of Periodic Structures Using Continuously Moving Stage

Authors: J. Klingfus, J.E. Sanabia, K.E. Burcham, M. Kahl

Affilation: Raith USA, United States

Pages: 450 - 453

Keywords: electron beam lithography, stitching, periodic structures, grating, photonic crystal, nanosieve

Abstract:
A unique EBL writing technique is presented which is ideally suited to patterns of a periodic nature such as gratings, holograms, photonic crystals, sieves, etc. In contrast to classic step-and-write EBL strategies, this technique writes while the sample is in continuous movement, thus reducing classic “stitching” errors while also increasing throughput. Results of Bragg gratings written with this new patterning method will be discussed, as well further elaboration of the details regarding this new patterning strategy.


ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95