Nano Science and Technology Institute
Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 5: Micro & Nano Fluidics

Metrology for Lab on a Chip Final Product Devices

Authors:D.R. Reyes, M. Halter, J. Hwanga
Affilation:National Institute of Standards and Technology, US
Pages:338 - 341
Keywords:dimensional metrology, OCT, confocal fluorescence, lab-on-a-chip, PMMA
Abstract:New metrology tools to measure the critical parameters of internal structures in lab on a chip devices are greatly needed in order to develop standard tests for this technology. Here we present a method that combines a custom made optical coherence tomography (OCT) system with an in-house written ImageJ macro to analyze internal structures of poly(methyl methacrylate) (PMMA) final product devices. Dimensional information was obtained from OCT images and compared with images acquired using confocal reflectance and confocal fluorescence microscopies. Although there is no established method for dimensional measurements of lab on a chip final product devices when OCT and confocal fluorescence microscopy, a well established technique for measuring fluorescent fluids within microchannels, were compared the values obtained from both techniques were remarkably similar.
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