Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

Micro & Nano Fluidics Chapter 5

Metrology for Lab on a Chip Final Product Devices

Authors: D.R. Reyes, M. Halter, J. Hwanga

Affilation: National Institute of Standards and Technology, United States

Pages: 338 - 341

Keywords: dimensional metrology, OCT, confocal fluorescence, lab-on-a-chip, PMMA

Abstract:
New metrology tools to measure the critical parameters of internal structures in lab on a chip devices are greatly needed in order to develop standard tests for this technology. Here we present a method that combines a custom made optical coherence tomography (OCT) system with an in-house written ImageJ macro to analyze internal structures of poly(methyl methacrylate) (PMMA) final product devices. Dimensional information was obtained from OCT images and compared with images acquired using confocal reflectance and confocal fluorescence microscopies. Although there is no established method for dimensional measurements of lab on a chip final product devices when OCT and confocal fluorescence microscopy, a well established technique for measuring fluorescent fluids within microchannels, were compared the values obtained from both techniques were remarkably similar.


ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95