Nano Science and Technology Institute
Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications

Nanoceramic MEMS Sensors for Universal Embedded Chemical Sensing

Authors:C.J. Kostelecky, C. Sneider, R. Wind, D.J. Deininger
Affilation:Synkera Technologies Inc., US
Pages:209 - 212
Keywords:sensors, gas sensors, nanotechnology, MEMS
Abstract:This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.
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