Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

Nanoceramic MEMS Sensors for Universal Embedded Chemical Sensing

Authors: C.J. Kostelecky, C. Sneider, R. Wind, D.J. Deininger

Affilation: Synkera Technologies Inc., United States

Pages: 209 - 212

Keywords: sensors, gas sensors, nanotechnology, MEMS

Abstract:
This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.


ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95