Nano Science and Technology Institute
Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications

Non-contact biaxial nanoprobe utilized for surface measurements of MEMS

Authors:B. Goj, L. Dressler, M. Hoffmann
Affilation:Ilmenau University of Technology, DE
Pages:197 - 200
Keywords:biaxial nanoprobe, non-contact, electrostatic actuator, silicon micromachining
Abstract:In this work an oscillating biaxial nanoprobe will be presented which measures the surface of a measurement object. The biaxial nanoprobe vibrates in two directions to realize scanning measurements and to overcome the challenges of sticking. Two electrostatic actuators drive the nanoprobe in x- and y-direction and two electrostatic sensors measure the position of the probe. If the touching element of the biaxial nanoprobe is close enough to the measurement object (≤ 1 µm) the oscillations are damped because of the squeeze film damping between the measurement object and the spherical touching element. A contact model for the oscillating nanoprobe will be presented. Therewith, the influences of the measurement environment to the behaviour of the nanoprobe will be discussed.
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