Nano Science and Technology Institute
Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

Authors:A. Merdassi, V.P. Chodavarapu
Affilation:McGill University, CA
Pages:185 - 188
Keywords:low-g accelerometers, MEMS sensors, capacitance sensing, microfabrication, SOIMUMPS
Abstract:We describe integrated multi-axis low-g MEMS accelerometer devices fabricated in a commercial SOIMUMPS process available from MEMSCAP. We employ capacitive transduction mechanism which provides high reliability, low temperature sensitivity, low drift, and low power consumption. We introduce a new technique to reduce or eliminate the cross-axis sensitivity based on the design of using both decoupled frames and different mechanical springs that are sensitive for each specific axis.
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