Nanotech 2013 Vol. 2
Nanotech 2013 Vol. 2
Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

Nano Electronics & Photonic Materials & Devices Chapter 1

Mid-infrared Silicon Platform for Chip-scale Chemical Sensors

Authors: P.T. Lin, H.-Y.G. Lin, V. Singh, N.S. Patel, J. Hu, K. Richardson, I. Luzinov, J. Hensley, L. Kimerling, A. Murthy Agarwal

Affilation: Massachusetts Institute of Technology, United States

Pages: 48 - 50

Keywords: sensor ona chip, integrated photonics, mid-infrared

Abstract:
Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.


ISBN: 978-1-4822-0584-8
Pages: 808
Hardcopy: $209.95