Authors: P.T. Lin, H.-Y.G. Lin, V. Singh, N.S. Patel, J. Hu, K. Richardson, I. Luzinov, J. Hensley, L. Kimerling, A. Murthy Agarwal
Affilation: Massachusetts Institute of Technology, United States
Pages: 48 - 50
Keywords: sensor ona chip, integrated photonics, mid-infrared
Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.