Nano Science and Technology Institute
Nanotech 2013 Vol. 1
Nanotech 2013 Vol. 1
Nanotechnology 2013: Advanced Materials, CNTs, Particles, Films and Composites (Volume 1)
Chapter 10: Nanostructured Materials & Devices

A Novel Silicon Nanowire-based Electron Detector Utilized in Scanning Electron Microscopes

Authors:M. Hajmirzaheydarali, M. Akbari, S. Mohajerzadeh
Affilation:University of Tehran, IR
Pages:696 - 698
Keywords:nano-structure, silicon nanowire, scanning electron microscope, electron detector
Abstract:Electron microscopes are the scientific tools which utilize highly energetic electron beam to overcome the light limitations in the study of specimen in nm scale. Electron detection has an important role in microscopic analysis and known as one of the most important blocks of SEM. The conventional Everhart-Thornley detector utilized optical approach, consists of scintillator, photomultiplier and amplifier. Due to optical instruments used in construction of the detector, it is a large sophisticated device which cannot close to the specimen. For getting more resolution and contrast, it’s better to close the detector to the specimen to collect more electrons. Here, our novel electron detector is a miniaturized nano-structured device which can be approached to the specimen. This detector attracts electrons along with converting their current to voltage directly. It was fabricated by growing silicon nanowires on a p-type silicon substrate covered by gold in a VLS process. The SiNWs with the diameter less than 70nm along with Si substrate were highly doped to act as nm electron sensitive conductive wires. The ultra-low cost, high voltage free, simply fabricated nano-structured detector which eliminates the optical phase from the electron detection process enhances the yield of electron detection in a highly manner.
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