Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 8: Modeling & Simulation of Microsystems

Research on Non-linear Vibration in Micro-machined Resonant Accelerometer

Authors:Z. Shuming, L. Yunfeng, W. Fan, D. Jingxin
Affilation:Tsinghua University, CN
Pages:637 - 640
Keywords:SOA, nonlinear vibration, simulation, system optimization
Abstract:This paper analyses the non-linear vibration of the Silicon Oscillating Accelerometer (SOA) by system modeling and simulation, and the optimization designation to weaken the influence of the nonlinear vibration are proposed. With the decreasing of the mechanism dimensions of the Silicon Oscillating Accelerometer, the effect of the non-linear vibration become more obviously, affecting the precision and system stability of SOA. This paper analyses the influence of nonlinear vibration to SOA and presents the nonlinear system simulation. The simulation results of the system characteristics are well consistent with the experiments, and the simulation results also predict that the optimizing structural will effectively weaken the nonlinear effect.
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