 | Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 8: Modeling & Simulation of Microsystems |
FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity | |
| Authors: | H.B. Nguyen, F. Mailly, L. Latorre, P. Nouet |
| Affilation: | University Montpellier 2 / CNRS - LIRMM, FR |
| Pages: | 621 - 624 |
| Keywords: | FEM, thermal simulation, accelerometer |
| Abstract: | Thermal convective accelerometers are based on heat transfer in a sealed cavity filled with a fluid. The principle was patented in the 40’s and the first implementations on silicon, obtained with bulk micromachining, were reported in 1997-98. Since that time, many single and 2-axis sensors were reported in the literature but not 3-axis device based on a standard technology. Therefore, the goal of this study is to demonstrate the feasibility of a simple third sensitive axis and provide the MEMS designer with a compact model and the main parameters that govern the sensitivity. |
| ISBN: | 978-1-4665-6275-2 |
| Pages: | 878 |
| Hardcopy: | $209.95 |
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up |
© 2013 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map
Terms of Use | Privacy Policy | Contact Us | Site Map