Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

NanoFab: Manufacturing & Instrumentation Chapter 7

Robust thin spin-coated silver films with polymer thin layers for SPR image sensor applications

Authors: J.-H. Son, Y.-J. Cho, M.-H. Lee

Affilation: Sungkyunkwan University, Korea

Pages: 543 - 545

Keywords: SPR, silver, ink, film, spin-coating, sensor

We fabricated thin silver films with thicknesses of 20 nm, 40 nm, and 60 nm on a prism using a spin coating method for SPR image sensor module applications. An aqueous silver ionic complex solution was spin-coated and then thermally cured. On those, a robust low loss polymer was spin-coated and cured with thicknesses of 100 nm. The developed SPR image sensor modules were applied to measure the content of alcohol with the average pixel intensity. The coefficients of determination for the 20-nm-, 40-nm- and 60-nm-thick silver films with and without the polymer layer were 0.923, 0.990, 0.989, and 0.923, 0.995, 0.972 respectively when standard ethanol solutions with 0.1% intervals in the range of 20.0% to 20.5% were applied. The durability of the 40-nm-thick spin-coated silver film with the 100-nm-thick polymer layer is much better than without the upper polymer layer. The spin coating method of the very thin silver and sequential polymer films for SPR image sensor modules is expected to be a very cost-effective and robust solution because the films is formed at a low temperature in a short period of time without requiring a vacuum system and they have a much improved durability.

ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95