Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

NanoFab: Manufacturing & Instrumentation Chapter 7

Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams

Authors: K. Hayashi, F. Tanaka, T. Sugiura, T. Matsuda

Affilation: Kanazawa Institute of Technology, Japan

Pages: 535 - 538

Keywords: neutral free-radical beam, CW laser, negative ion, quantum device processing

Abstract:
Ion-current difference measurement by light intensity modulation ( ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.


ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95