 | Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 7: NanoFab: Manufacturing & Instrumentation |
Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams | |
| Authors: | K. Hayashi, F. Tanaka, T. Sugiura, T. Matsuda |
| Affilation: | Kanazawa Institute of Technology, JP |
| Pages: | 535 - 538 |
| Keywords: | neutral free-radical beam, CW laser, negative ion, quantum device processing |
| Abstract: | Ion-current difference measurement by light intensity modulation ( ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution. |
| ISBN: | 978-1-4665-6275-2 |
| Pages: | 878 |
| Hardcopy: | $209.95 |
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