Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 7: NanoFab: Manufacturing & Instrumentation

Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams

Authors:K. Hayashi, F. Tanaka, T. Sugiura, T. Matsuda
Affilation:Kanazawa Institute of Technology, JP
Pages:535 - 538
Keywords:neutral free-radical beam, CW laser, negative ion, quantum device processing
Abstract:Ion-current difference measurement by light intensity modulation ( ICD ) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.
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