 | Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 5: Micro & Nano Fluidics |
Effects of Solvents on Dissolution of Photoresist in Parylene Microchannels | |
| Authors: | H. Ceylan Koydemir, H. Kulah, C. Ozgen, I. Tosun |
| Affilation: | Middle East Technical University, TR |
| Pages: | 372 - 375 |
| Keywords: | microchannels, dissolution, photoresist |
| Abstract: | This paper presents a detailed study for the effects of different types of solvents on dissolution of photoresist inside the parylene micro-channels, for the first time. Experimental results indicate that photoresist dissolution in dipolar aprotic solvents is much faster than the other types of solvents. This finding can be used to select alternative chemicals for stripping encapsulated photoresist. |
| ISBN: | 978-1-4665-6275-2 |
| Pages: | 878 |
| Hardcopy: | $209.95 |
| Order: | Mail/Fax Form |
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