Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 5: Micro & Nano Fluidics

Effects of Solvents on Dissolution of Photoresist in Parylene Microchannels

Authors:H. Ceylan Koydemir, H. Kulah, C. Ozgen, I. Tosun
Affilation:Middle East Technical University, TR
Pages:372 - 375
Keywords:microchannels, dissolution, photoresist
Abstract:This paper presents a detailed study for the effects of different types of solvents on dissolution of photoresist inside the parylene micro-channels, for the first time. Experimental results indicate that photoresist dissolution in dipolar aprotic solvents is much faster than the other types of solvents. This finding can be used to select alternative chemicals for stripping encapsulated photoresist.
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