Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 5: Micro & Nano Fluidics

Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

Authors:S. Nigro, L. Pagnotta, M.-F. Pantano
Affilation:Università della Calabria, IT
Pages:333 - 336
Keywords:squeeze-film damping, MEMS, FEM
Abstract:In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure regime. Finally, we discuss our results, which show good agreement with the corresponding experimental data.
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