Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications

Advances in MEMS Fabrication for Fabless MEMS Companies

Authors:M. Lim, M. Daneman
Affilation:InvenSense, US
Pages:168 - 171
Keywords:fabless MEMS CMOS-MEMS
Abstract:InvenSense, a fabless MEMS company has successfully transferred its proprietry fabriction process has been to multiple foundries to support high volume production of multiple products. The process supports CMOS electronics integration and incorporates wafer level packaging. These advances to the state of MEMS manufacturing provides fabless MEMS companies an alternative to a costly and time consuming process development cycle and a direct path to high volume production.
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