Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 3: MEMS & NEMS Devices & Applications

MEMS Oscillators

Authors:A. Partridge
Affilation:SiTime, Corp., US
Pages:219 - 222
Keywords:MEMS, oscillators, resonators, timing, TCXO, VCXO, DCXO, XO
Abstract:MEMS oscillators are now replacing legacy quartz crystal oscillators. They provide higher performance, new features, improved reliability, shorter lead times, and reduced cost. We will present the highest performance MEMS oscillator to date, discussing the construction and performance. This paper will review the market segmentation and commercial impact of the technology and discuss the future direction of the industry.
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