Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

MEMS & NEMS Devices & Applications Chapter 3

Gas sensor device based on a SnO2 nanowire network for increased sensing performances
E. Brunet, G.C. Mutinati, S. Steinhauer, A. Koeck
AIT Austrian Institute of Technology GmbH, AT

Thermal-managed sputtered micro machined gas chromatography columns for oilfield applications
R. Haudebourg, J. Vial, D. Thiébaut, P. Sassiat, I. Azzouz, K. Danaie, B. Bourlon
Schlumberger, FR

NH3 sensing properties of centimeter scaled CVD graphene in ambient condition
J. Lim, R. Anoop, J.H. Kim, J. Yoon, H-R Ahn, S. Song, Y-J Kim, S.C. Jun
Yonsei University, KR

A MEMS-type Micro Sensor for Hydrogen Gas Detection
J.-H. Yoon, B.-J. Kim, J.-S. Kim
University of Seoul, KR

3D Electrostatic Energy Harvester
V. Janicek, M. Husak, J. Formanek, J. Jakovenko
FEE CTU in Prague, CZ

MEMS Strain Sensors with High Linearity and Sensitivity with an Enhanced Strain Transfer Mechanism for Wind Turbine Blades
M. Moradi, S. Sivoththaman
University of Waterloo, CA

In situ monitoring of temperature and voltage in lithium-ion rechargeable batteries using flexible micro two-in-one sensors
S-J Lee, C-Y Lee, M-S Tang, P-C Chen, Y-M Chang
Yuan Ze University, TW

Electrical Nerve Agents Sensors Based on Chemically Functionalized Nanomaterials
J.-P. Simonato
CEA, FR

Effect of CuO/water nanofluid in the enhancement of convective heat transfer for electronic cooling
P. Selvakumar, S. Suresh
National Institute of Technology, Tiruchirappalli, IN

High Performance Sputtered PZT Film for MEMS applications
Y. Hishinuma, Y. Li, J. Birkmeyer, T. Fujii, T. Naono, T. Arakawa
FUJIFILM Dimatix, US

Novel three-dimensional porous film for single-cell microarray applications
S. Ranjan, Z. Yong
National University of singapore, SG

MEMS Based AC Voltage References Toward Metrological Applications
H. Camon, A. Bounouh, F. Blard, D. Bélières
LAAS/CNRS, FR

An optofluidic device for characterizing the effect of viscosity and density on mass transfer
M.I. Lapsley, N. Nama, S. Yazdi, T.J. Huang
Pennsylvania State University, US

Novel MEMS-Based Diffractive Spatial Light Modulator
H. Woo, S. Li, A.J. Cable
Light Blue Optics, Inc., US

Fabrication and Characterization of HAR Microfluidic Device to Concentrate Microalgae
V. Singh, Q. Nguyen, J. Goettert, D. Yemane, J. Bargiel, C. Lane, F. Stephenson
Louisiana State University, US

Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications
E. Cagatay, Y. Damgaci, B.A. Cetiner, N. Biyikli
Bilkent University - UNAM, TR

Is one gyroscope enough?
M. Capovilla
STMicroelectronics, US

Advances in MEMS Fabrication for Fabless MEMS Companies
M. Lim, M. Daneman
InvenSense, US

A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications
A. Nubile, A. Poggi, E. Cozzani, I. Elmi, S. Zampolli, M. Messina, G.C. Cardinali, F. Mancarella, M. Belluce
CNR, IT

Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications
D. Kaden, S. Gu-Stoppel, H.-J. Quenzer, D. Kaltenbacher, B. Wagner, R. Dudde
Fraunhofer Inst. Silicon Technology, DE

High accuracy dual side overlay with wet anisotropic etching for HAR MEMS.
H.W. van Zeijl, K. Best, P.M. Sarro
Delft University of Technology, NL

Micro Patterning of Organic Solvents on OLED Device Using EHD Inkjet Technology
S.-H. Lee, X.H. Nguyen, W. Jo, H.S. Ko
Sungkyunkwan University, KR

Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures
J. Goettert, S. Lemke, I. Rudolph, T. Seliger, B. Loechel
Louisiana State University, US

Design of a nano-mechanical beam based memory element
H.K. Sahoo, A. Uppala, R. Anjur
University of Pennsylvania, US

Measuring System Mass and Density of MEMS by Electronic Probing
A. Chigullapalli
Purdue University, US

Direct-Write Microfabrication for Enhancement of Functionality of Optical Fiber Devices
H.R. Alemohammad, E. Foroozmehr, B. Cotten, E. Toyserkani
University of Waterloo, CA

Fetal Movement Detection Based on MEMS Accelerometer
L. Minjie, T. Yongkang, L. Yunfeng, Y. Song, D. Jingxin
Tsinghua University, CN

Measuring the layer thickness of MEMS using torsional resonance
N.D. Andrews, J.V. Clark
Purdue University, US

Temperature and Strain Response of a Surface Acoustic Wave Sensor
W.C. Wilson, G.M. Atkinson
NASA Langley Research Center, US

Reversible and irreversible temperature-induced changes in exchange-biased planar Hall effect bridge (PHEB) magnetic field sensors.
G. Rizzi, N.C. Lundtoft, F.W. Østerberg, M.F. Hansen
Technical University of Denmark, DK

MEMS Oscillators
A. Partridge
SiTime, Corp., US

Sensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors
N. Kacem, M. Sworowski, S. Hentz, S. Baguet, R. Dufour
FEMTO-ST, FR

Health monitoring of flexible composite plates: a MEMS-based approach
S. Mariani, A. Corigliano, F. Caimmi, M. Bruggi, P. Bendiscioli, M. De Fazio
Politecnico di Milano, STMicroelectronics, IT

The field self-calibration method of MEMS gyroscopes and accelerometers for Micro inertial measurement system
J.L. Li, A.S. Chen, M. Du
Beijing University of Aeronautics and Astronautics, CN

Application of Micro-channel Cooling to the Local Thermal Management of Detectors Electronics for Particle Physics
A. Mapelli, P. Petagna, A. Pezous, P. Renaud
CERN, CH

The Fabrication and Multi-Physics Simulation of a Novel Low Power Electrothermal Bimorph Actuator
W-Z Lou, M-R Guo, Y-J Lv
Beijing Institute of Technology, CN

Lumped Electro-Thermo-Mechanical Beam Model
A. Chigullapalli
Purdue University, US

Research in a Novel Integrated Chip of Safe and Initiation Control
Y. Zhao, W.-Z. Lou, D.-G. Li
Beijing Institute of Technology, CN


ISBN: 978-1-4665-6275-2
Pages: 878
Hardcopy: $209.95