Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)

Chapter 3:

MEMS & NEMS Devices & Applications

-Gas sensor device based on a SnO2 nanowire network for increased sensing performances
 E. Brunet, G.C. Mutinati, S. Steinhauer, A. Koeck
 AIT Austrian Institute of Technology GmbH, AT
-Thermal-managed sputtered micro machined gas chromatography columns for oilfield applications
 R. Haudebourg, J. Vial, D. Thiébaut, P. Sassiat, I. Azzouz, K. Danaie, B. Bourlon
 Schlumberger, FR
-NH3 sensing properties of centimeter scaled CVD graphene in ambient condition
 J. Lim, R. Anoop, J.H. Kim, J. Yoon, H-R Ahn, S. Song, Y-J Kim, S.C. Jun
 Yonsei University, KR
-A MEMS-type Micro Sensor for Hydrogen Gas Detection
 J.-H. Yoon, B.-J. Kim, J.-S. Kim
 University of Seoul, KR
-3D Electrostatic Energy Harvester
 V. Janicek, M. Husak, J. Formanek, J. Jakovenko
 FEE CTU in Prague, CZ
-MEMS Strain Sensors with High Linearity and Sensitivity with an Enhanced Strain Transfer Mechanism for Wind Turbine Blades
 M. Moradi, S. Sivoththaman
 University of Waterloo, CA
-In situ monitoring of temperature and voltage in lithium-ion rechargeable batteries using flexible micro two-in-one sensors
 S-J Lee, C-Y Lee, M-S Tang, P-C Chen, Y-M Chang
 Yuan Ze University, TW
-Electrical Nerve Agents Sensors Based on Chemically Functionalized Nanomaterials
 J.-P. Simonato
-Effect of CuO/water nanofluid in the enhancement of convective heat transfer for electronic cooling
 P. Selvakumar, S. Suresh
 National Institute of Technology, Tiruchirappalli, IN
-High Performance Sputtered PZT Film for MEMS applications
 Y. Hishinuma, Y. Li, J. Birkmeyer, T. Fujii, T. Naono, T. Arakawa
-Novel three-dimensional porous film for single-cell microarray applications
 S. Ranjan, Z. Yong
 National University of singapore, SG
-MEMS Based AC Voltage References Toward Metrological Applications
 H. Camon, A. Bounouh, F. Blard, D. Bélières
-An optofluidic device for characterizing the effect of viscosity and density on mass transfer
 M.I. Lapsley, N. Nama, S. Yazdi, T.J. Huang
 Pennsylvania State University, US
-Novel MEMS-Based Diffractive Spatial Light Modulator
 H. Woo, S. Li, A.J. Cable
 Light Blue Optics, Inc., US
-Fabrication and Characterization of HAR Microfluidic Device to Concentrate Microalgae
 V. Singh, Q. Nguyen, J. Goettert, D. Yemane, J. Bargiel, C. Lane, F. Stephenson
 Louisiana State University, US
-Fabrication and characterization of liquid metal-based micro-electromechanical DC-contact switch for RF applications
 E. Cagatay, Y. Damgaci, B.A. Cetiner, N. Biyikli
 Bilkent University - UNAM, TR
-Is one gyroscope enough?
 M. Capovilla
 STMicroelectronics, US
-Advances in MEMS Fabrication for Fabless MEMS Companies
 M. Lim, M. Daneman
 InvenSense, US
-A Novel Pneumatically Driven SU-8 Microvalve for High Speed Gas Chromatographic Applications
 A. Nubile, A. Poggi, E. Cozzani, I. Elmi, S. Zampolli, M. Messina, G.C. Cardinali, F. Mancarella, M. Belluce
-Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications
 D. Kaden, S. Gu-Stoppel, H.-J. Quenzer, D. Kaltenbacher, B. Wagner, R. Dudde
 Fraunhofer Inst. Silicon Technology, DE
-High accuracy dual side overlay with wet anisotropic etching for HAR MEMS.
 H.W. van Zeijl, K. Best, P.M. Sarro
 Delft University of Technology, NL
-Micro Patterning of Organic Solvents on OLED Device Using EHD Inkjet Technology
 S.-H. Lee, X.H. Nguyen, W. Jo, H.S. Ko
 Sungkyunkwan University, KR
-Soft X-Ray Lithography for High-Aspect Ratio Sub-Micrometer Structures
 J. Goettert, S. Lemke, I. Rudolph, T. Seliger, B. Loechel
 Louisiana State University, US
-Design of a nano-mechanical beam based memory element
 H.K. Sahoo, A. Uppala, R. Anjur
 University of Pennsylvania, US
-Measuring System Mass and Density of MEMS by Electronic Probing
 A. Chigullapalli
 Purdue University, US
-Direct-Write Microfabrication for Enhancement of Functionality of Optical Fiber Devices
 H.R. Alemohammad, E. Foroozmehr, B. Cotten, E. Toyserkani
 University of Waterloo, CA
-Fetal Movement Detection Based on MEMS Accelerometer
 L. Minjie, T. Yongkang, L. Yunfeng, Y. Song, D. Jingxin
 Tsinghua University, CN
-Measuring the layer thickness of MEMS using torsional resonance
 N.D. Andrews, J.V. Clark
 Purdue University, US
-Temperature and Strain Response of a Surface Acoustic Wave Sensor
 W.C. Wilson, G.M. Atkinson
 NASA Langley Research Center, US
-Reversible and irreversible temperature-induced changes in exchange-biased planar Hall effect bridge (PHEB) magnetic field sensors.
 G. Rizzi, N.C. Lundtoft, F.W. Østerberg, M.F. Hansen
 Technical University of Denmark, DK
-MEMS Oscillators
 A. Partridge
 SiTime, Corp., US
-Sensitive detection of nonlinear nanomechanical motion using capacitive signal down-mixing for resonant NEMS-based sensors
 N. Kacem, M. Sworowski, S. Hentz, S. Baguet, R. Dufour
-Health monitoring of flexible composite plates: a MEMS-based approach
 S. Mariani, A. Corigliano, F. Caimmi, M. Bruggi, P. Bendiscioli, M. De Fazio
 Politecnico di Milano, STMicroelectronics, IT
-The field self-calibration method of MEMS gyroscopes and accelerometers for Micro inertial measurement system
 J.L. Li, A.S. Chen, M. Du
 Beijing University of Aeronautics and Astronautics, CN
-Application of Micro-channel Cooling to the Local Thermal Management of Detectors Electronics for Particle Physics
 A. Mapelli, P. Petagna, A. Pezous, P. Renaud
-The Fabrication and Multi-Physics Simulation of a Novel Low Power Electrothermal Bimorph Actuator
 W-Z Lou, M-R Guo, Y-J Lv
 Beijing Institute of Technology, CN
-Lumped Electro-Thermo-Mechanical Beam Model
 A. Chigullapalli
 Purdue University, US
-Research in a Novel Integrated Chip of Safe and Initiation Control
 Y. Zhao, W.-Z. Lou, D.-G. Li
 Beijing Institute of Technology, CN
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