Nano Science and Technology Institute
Nanotech 2012 Vol. 2
Nanotech 2012 Vol. 2
Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Chapter 1: Nano Electronics & Photonic Devices

Synthesis of ZnO Nanosheets by Exposing Zn Film to Oxygen Plasma at Low Temperatures

Authors:J.H. Yoon
Affilation:Kangwon National University, KR
Pages:52 - 55
Keywords:zinc oxide, nanosheet
Abstract:We report that the well-defined ZnO nanosheets can be synthesized by directly exposing Zn film to oxygen plasma produced by PECVD method using N2O gas at temperatures below 350 oC. FESEM, XRD, TEM, and PL measurements were performed to characterize ZnO nanosheets. The analysis shows that the nanosheets have a wurtzite type hexagonal structure with lattice constants of a = 0.3250 nm and c = 0.5211 nm grown along the [10-10] direction. The growth mechanism for ZnO nanosheets will be presented.
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