Nanotech 2012 Vol. 1
Nanotech 2012 Vol. 1
Nanotechnology 2012: Advanced Materials, CNTs, Particles, Films and Composites (Volume 1)

Nanoparticle Synthesis & Applications Chapter 4

MD Simulations on the Momentum Transfer to Nano Contaminant Particle on Wafer Surface in Collisions with Cleaning Bullets

Authors: M.S Choi, J.W Lee

Affilation: POSTECH, Korea

Pages: 386 - 389

Keywords: MD, nano cleaning, momentum transfer

Abstract:
This study aims to clarify the basic mechanism through MD simulations on momentum transfer during collisions between target contaminant and cleaning bullet particles both in the nanometer size range. Even in conditions where the contaminant particle was successfully removed from the surface, the fraction of the bullet kinetic energy transferred to the target particle was very small - 0.066 with Ar bullet, and even smaller - 0.02 with N2 bullet.For a given bullet particle, the fraction of transferred kinetic energy was nearly constant regardless of the velocity and the size of the bullet particle.


ISBN: 978-1-4665-6274-5
Pages: 804
Hardcopy: $209.95