Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 9: Nano & Micro: Computational Methods, Simulation & Software Tools

SUGARX: A Online Tool That Bridges the Gap Between Experiment and Simulation

Authors:P. Marepalli, F. Li, J.V. Clark
Affilation:Purdue University, US
Pages:627 - 630
Keywords:MEMS design and test cycle, self-calibration, electro micro metrology
Abstract:We present a pioneering online tool called SugarX that, for the first time, bridges the gap between experiment and simulation. Our tool is available online at with remote experimental control and simulation. A web browser on a computer or smartphone is all that is required to use SugarX to remotely control an experiment on a Micro Electro Mechanical System (MEMS). In SugarX, both the true device and computer model share the same electromechanical structural properties. This is achieved using a technique called electro micro metrology (EMM) to extract actual device properties and substitute them in computer model. Ideally, the true device and its model share the same performances when the same voltages are applied, unless there is unaccounted phenomena present. In the present case, the user is able to detect and model both the Casimir force and van der Waals force in a MEMS. The current framework of SugarX may also be used to achieve experimentally accurate models.
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