Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 7: Micro & Nano Fluidics

Accommodation coefficient investigation in rectangular micro-channels for large Knudsen number range

Authors:M. Hadj Nacer, I. Graur, P. Perrier
Affilation:Université de Provence, FR
Pages:485 - 488
Keywords:gas flows, mass flow rate, pressure measurements, accommodation coefficient
Abstract:Experimental and numerical investigations on the flow through rectangular microchannel are presented. The constant volume technique was used to measure the mass flow rate through rectangular microchannel which had gold deposits on the interior surfaces. The aim of this work is the determination of the accommodation coefficient by comparing the experimental results to analytical calculations in the hydrodynamic and slip regimes, and to calculations based on the numerical solution of the model kinetic equation in the transitional regime.
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