Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications

Comb Finger Capacitive Micro Wind Senor

Authors:Z. Zhao, Y. Han, L. Du, Z. Fang, X. Wang
Affilation:Institute of Electronics,CAS, CN
Pages:414 - 417
Keywords:comb finger, micro wind sensor
Abstract:This paper reports a novel micro wind sensor with comb finger shaped structure based on MEMS technology and capacitive sensing principle, which can measure wind speed and direction simultaneously. The proposed sensor was theoretically analyzed based on fluid mechanics theory and simulated by FEA software ANSYS. The fabrication processes based on Si-Glass anodic bonding and DRIE technology were designed and experiments were carried out to research how sensor structure released. The sensor was fabricated with the size of 1cm×1cm and packaged on a PCB board and tested in a wind tunnel. The test result shows that the sensor can realize wind speed measurement and is sensitive to wind direction.
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