Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

Authors:P. Qu
Affilation:Oakland University, US
Pages:406 - 409
Keywords:MEMS, accelerometer, MetalMUMPS, fully differential
Abstract:As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. The wet releasing process of the sensor allows for high yield, good process consistency. Possible low manufacturing cost of the MEMS elements can be expected if wafer-level fabrication, package and dicing services are requested.
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