Authors: P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang
Affilation: National Tainwan University, Taiwan
Pages: 402 - 405
Keywords: microcantilever, TFT, surface stress, sensors
Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible change in drain current confirms the feasibility of TFT-based MCLs for monitoring deflection at the sensitivity of 40 nA/μm.