Nano Science and Technology Institute
Nanotech 2011 Vol. 2
Nanotech 2011 Vol. 2
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Chapter 5: MEMS & NEMS Fabrication, Devices & Applications

Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection

Authors:P-Y Lin, Y-J Cheng, S. Kuan, and L-S. Huang
Affilation:National Tainwan University, TW
Pages:402 - 405
Keywords:microcantilever, TFT, surface stress, sensors
Abstract:Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible change in drain current confirms the feasibility of TFT-based MCLs for monitoring deflection at the sensitivity of 40 nA/μm.
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